Ulvac VD30C, Инструкция по эксплуатации

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YK15-0009-DI-002-04
18
3.3 Inlet port Piping
Provide main valve, vacuum gauge and leak valve between the vacuum chamber and pump,
as shown in Fig. 15.
Fig. 15 Connection to vacuum chamber (example)
Use the flange for connection between the Pump Inlet and the piping.
MODEL Flange at the pipe
VD30C
VF40
JIS B 2290:1998
Vacuum technology-Flange dimensions;
Attachment book (Reference)
Flange dimensions for maintenance
VD40C
VD60C
VF50
VD90C
CAUTION
① Wash sufficiently inside the Vacuum chamber, pipes, Main valve and
so on to connect them to the Pump. If dirty unit were connected, it
would cause a trouble such like raise the ultimate pressure or extend
the depression time to the specified pressure. Wear a pair of gloves
to touch any vacuum section. Do not touch with the bare hand.
② Pay a full attention to completely clear the welding scale and/or rust
inside the pipe. If obliged to conduct a welding work close to or on
the inlet, take a measure such as to remove the Pump unit or put a
cover sheet on the inlet in order not to allow any foreign substance
enter inside.
③ Should the Pump sucked the water or substance such as dust,
powder and so on, it would impair the ultimate pressure and further
cause a trouble.
The Pump has a really slight clearance to keep rotation and easily
gets impossible to rotate by any foreign substance entered inside.
④ Clear the sand completely after having sand blasted the vacuum
chamber.
⑤ Pay attention not to give damage to the Flange sheet face, Gasket
slot or gasket itself.
⑥ Metal mesh on the Suction inlet is put to keep foreign substances
away from the Pump unit.
Be sure not to take it off unless necessitated so to check it.
⑦ Use a pipe having bellows between the Vacuum chamber and inlet of
the Mechanical Booster Pump so as to avoid any direct load to the
Pump flange and not to transfer the Pump vibration to the Vacuum
chamber.
⑧ Put the Main valve, Vacuum gauge and Leak valve between the
Vacuum chamber and the Pump
⑨ You should put the Leak valve closer as possible to the Main valve in
order to prevent the oil from rising up to the Vacuum chamber when
the Pump stopped.
If you use it together with the mechanical booster pump, be sure to
put the valve above the Pump.