Ulvac VD30C, Инструкция по эксплуатации

Страница: 7 / 78

YK15-0009-DI-002-04
iii
0.3 Safety Precautions
Descriptions are given as the method to keep away from danger and actions that must be
restricted on the use of this product.
Use of this product and this Instruction Manual.
IMPORTANT
Please read this Instruction Manual before starting installation, operation
check or maintenance of this product to use it in long term. You are
requested to fully understand the safety precautions, specifications and
operation methods of this product.
DANGER
Use of the toxic, combustible or combustion susceptible gas other than
inactive gas is not allowed as there is a risk of leakage of the gas from
the Pump unit if it was exhausted by the vacuum pump.
DANGER
Use of the toxic, combustible or combustion susceptible gas and
substance other than inactive gas is not allowed as there is a risk of
causing fire or explosion inside the Pump unit if it was exhausted by the
vacuum pump.
DANGER
It is not allowed to use any corrosive gas other than inactive gas as it
might cause corrosion and/or give damage on pump parts when
discharged through vacuum pump.