Ulvac VD30C, Инструкция по эксплуатации

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YK15-0009-DI-002-04
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5.2.4 Oil Leak Check
The Pump system needs repair if occurred any oil leak from the Shaft sealing or Pump unit.
Type of the seals and O-rings are listed at the end of this document. Please contact the Service
Center close to you for purchase and repair.
5.2.5 Checking Gas Ballast Function
When used the Gas ballast function, the valve or in the introduction passage inside the Pump
may be stuck in the dust. Replacement parts and repair support at the local service center.
Please contact us.
5.2.6 Checking Metal Mesh at the Suction Inlet
The Suction inlet might be clogged by the dust contained in the gas breathed in from the
Vacuum chamber and thus the Pump performance might be impaired.
If there is the metal mesh is dirty, please wash that.
Further it is anticipated that any welding scale drops off in the pipe particularly at the beginning
of the system start. Be fully cautious.
5.2.7 Checking Noise and Abnormal Vibration
Checking around the Pump
1) Check whether bolts and nuts and the like fixing the Pump are loose or not.
2) Check whether pipes connected to the inlet/outlet are loose or not.
3) Check and ensure that there is no leakage from the piping and valves.
Checking the Pump
Please refer to the “5.5 Trouble check list.”
Should the condition was not recovered after having checked points indicated there, please
contact the closest Service Center.