Ulvac PHS-04N, Инструкция по эксплуатации

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RF POWER SUPPLY and MATCHINGBOX Introduction
ii
1. Notes on safety
1
Most accidents are due to careless operation, inspection, maintenance, and repair. In
addition, they are more likely to occur when basic safety precautions are not followed or
when risk prediction is neglected. Accidents can be prevented by anticipating potentially
dangerous conditions.
2
Injuries and death occur due to incorrect operation, and improper inspection and
maintenance. Always carefully read and fully understand the details of operation,
inspection, and maintenance before running this product.
3
Safety warnings and precautions are clearly specified in this instruction manual and on
the warning labels. Please note that if you disregard these warnings and precautions, an
injury or death may result.
4
Managers, operators, and maintenance personnel must read this document well before
operating or maintaining this product. Ensure that personnel that know the proper handling
and have received the prescribed training carry out the proper work using the correct
techniques and tools.