Ulvac PHS-04N, Инструкция по эксплуатации

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RF POWER SUPPLY and MATCHINGBOX Introduction
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3. About this product
The descriptions and illustrations in this instruction manual are based on information at
the time the manual was created. The instruction manual may change without notice.
Because these changes affect inspections, check the latest information at ULVAC
distributors before starting work.
4. If you notice a problem with the product
If you notice a problem, verify the symptoms and breakdown condition. To prevent loss
due to misunderstanding or misrecognition and allow repairs to be completed promptly,
please try to make the details as clear as possible.
If you have determined there has been a breakdown or if you have questions, please
contact us. Before contacting us, note the product name or model name , serial number ,
and symptoms in as much detail as possible.
5. About disposal
Dispose of this product in accordance with national and local regulations.
The customer must bear any disposal costs.