Ulvac PHS-04N, Инструкция по эксплуатации

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RF POWER SUPPLY and MATCHINGBOX 4. Explanation of functions
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4. Explanation of functions
This section explains the functions.
4-1. Explanation of functions of the front panel
Figure 4-1 Explanation of functions of front panel
Table 4-1. Explanation of functions of front panel
Category Function
(1) POWER LED Switches on when the power supply is on.
(2) FREQ LED Reserve LED for expanded functionality. Normally not used.
(3) PLS LED Reserve LED for expanded functionality. Normally not used.
(4) PHASE LED Switches on when phase setting mode has been selected.
(5) ENT KEY Press this key to enable setting changes or complete configuration.
(6) DEC KEY Press this key to decrease a setting value or change a setting.
(7) INC KEY Press this key to increase a setting value or change a setting.
(8) PREV KEY Press this key to return to the previous item or page.
(9) NEXT KEY Press this key to move to the next item or page.
(1) (2)
(6) (7) (8) (9) (5) (4) (3)