Ulvac PHS-04N, Инструкция по эксплуатации

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RF POWER SUPPLY and MATCHINGBOX 1. For safe usage
1
1. For safe usage
1-1. Handling precautions
This section lists important safety points related to this product. Understand the following
points well before using this product.
Danger:
The voltage generated by this power supply is sufficient to endanger human
life. Use sufficient caution during handling. If by chance a person touches this
voltage, a serious accident will result. Take sufficient care not to touch
high-voltage areas. Furthermore, for your safety, never remove the covers.
1-2. Warning labels / nameplates
Note:
Keep warning labels clean and legible. Use a cloth and water to clean
warning labels. Do not use gasoline, organic solvent, or other similar items. If
a label has been damaged, lost, or become illegible, please contact ULVAC or
a distributor. The nameplate is affixed to the rear surface of the power supply.
Take special caution and ensure that it is always legible.
1-3. Inquiries
For part orders, product inquiries, and inquiries about product breakdowns, confirm the
product information, and then contact us. Particularly when a breakdown has been
determined, inform us of the product information, history, and symptoms in as much detail as
possible.
■ Product information (listed on nameplate)
Product model
Product serial number information (serial number, lot number)