Ulvac PHS-04N, Инструкция по эксплуатации

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RF POWER SUPPLY and MATCHINGBOX Introduction
i
Introduction
Thank you for purchasing this product.
This instruction manual is a guidebook that explains how to use this product safely and
efficiently. The basic precautions, operating points, and inspection and maintenance points
necessary for handling are listed. To prevent serious accidents, carefully read and thoroughly
understand the content of this instruction manual.
*Caution
Before using this product, always read this instruction manual and thoroughly understand
its running, operation, inspection and maintenance.
Do not run this product until you completely understand the content of this instruction
manual.

Please review content that is not clear and make efforts to use this product correctly.

About safety [Notes on safety] (Pii)
[Safety symbols] (Piii)
[For safe usage] (P1)
The items above are explained in this manual. Please understand them well before
use of the product.

Place this instruction manual near this product and store it safely.

If the product is moved to a different installation location, always move this
instruction manual along with it.

The content of this instruction manual may differ with the product you use because
the product may have been improved.

If you have any questions or concerns, please contact ULVAC or its distributors.

Please perform safe operation and proper maintenance.
There may be unavoidable changes or revisions of the content of this instruction manual
to change or improve product specifications.
*The copyright of the instruction manual and safety guide belong to ULVAC, Inc.

This instruction manual may not be copied in whole or in part without the
permission of ULVAC, Inc.

The use of this instruction manual other than for the handling of this product and to
which ULVAC, Inc. has agreed is prohibited.

Reproduction of any portion of this instruction manual for use by third party without
the consent of ULVAC is prohibited.