Ulvac GR60, Инструкция по эксплуатации

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Instructions Manual － Multiple Roots Type Dry Pump GR60/90/180
YK09-0023-DI-003-02
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mechanical seal may deteriorate. In such a case, the mechanical seal needs to be replaced.
Contact the nearest service center.
This product uses mechanical seal. If the pump needs to be operated after it has been stopped
for three months or longer or after it is relocated, the oil film may not be formulated at the sealing
part of the mechanical seal and it is not sealed. (If it is operated under this condition,
high-frequency metallic noise occurs.)
In such a case, it is necessary to supply the pump oil you are using by approx. 20 ml to the
mechanical seal. Check that the pump stops and the pressure in the pump is at the atmospheric
pressure, supply oil according to the figure below.
(1) Before starting work, be sure to turn off the power supply.
During the work, never turn on the power supply. Otherwise you may
get injured.
(2) Immediately after the operations stops, the pump temperature is
high. Wait for a while until the pump temperature becomes low and
then perform inspection. Otherwise you may get burned.
If it is used to exhaust hazardous gas, it goes without saying that not
only the pump body but also the pump oil will be toxic. Take due care.
Use our specified vacuum pump oil. If other oil is used, it is not covered
by the warranty since the pump performance may deteriorate and its life
is shortened.
(1) Wear protective equipment, such as rubber gloves and protective
glasses.
(2) Before starting the oil filling work, read "1.2 Material Safety Data
Sheet" in advance. In the event that the vacuum pump oil contacts
your hands or enters your eyes, follow the section about emergency
measures in the Material Safety Data Sheet.
CAUTION
CAUTION
DANGER
(2) Supply oil.
(1) Remove the oil plug.
(3) Attach the oil plug.
WARNING