Ulvac GR60, Инструкция по эксплуатации

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Instructions Manual － Multiple Roots Type Dry Pump GR60/90/180
YK09-0023-DI-003-02
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Intake and exhaust piping <Mounting>
Before starting work, check that all dangerous energies are shut out.
Nitrogen Gas Piping <Mounting>
(1)
Before starting work, check that all dangerous energies are shut
out.
(2) It is designed to prevent leakage under specified conditions and a
leak test is performed. However, any abnormal conditions outside
the range of the specifications (such as an abnormal pressure
increase) may cause leakage.
(3) Nitrogen gas is used as the shaft seal gas. Install in a ventilated
room.
(4) Attach a feed valve to stop the supply of Nitrogen gas.
Cooling Water Piping <Mounting>
(1) If the operation is continued under the conditions where the cooling
water flow is lower than the specified value, the pump may be
broken. Using a flow sensor etc, make a system that shuts out the
supply of electricity to the pump in the event that the cooling water
stops.
(2) Before starting work, check that all dangerous energies are shut out.
(3) It is designed to prevent leakage under specified conditions and a
leak test is performed. However, any abnormal conditions outside
the range of the specifications (such as an abnormal pressure
increase, condensation etc.) may cause leakage. In such a case,
water continues to leak until the supply from the device stops. Do
not install electric equipment or wires on the bottom of or the floor
surface in the proximity of the pump.
(4) During the operation of this product, the vacuum pump body needs
to be cooled at all times by supplying a specified amount of flowing
water. Install a flow meter that can visually recognize the flow (such
as a flow sight) to check that cooling water flows.
(5) Install a water leakage sensor on the floor under the pump. If any
water leakage is detected, immediately close the feed valve of the
cooling water and set up a system to shut out electricity to the pump.
(6) Attach a feed valve to stop the supply of cooling water.
WARNING
WARNING
WARNING