Ulvac GR60, Инструкция по эксплуатации

Страница: 43 / 54

Instructions Manual － Multiple Roots Type Dry Pump GR60/90/180
YK09-0023-DI-003-02
25
4.3 Operation Stop
For a while after the operation stops, do not touch the vacuum pump,
motor, and pipes since they are subjected to high temperature. If your
body comes into contact with them, you may get burned. Supply cooling
water until the pump temperature becomes low.
When shutting off the supply of cooling water immediately after the pump
operation stops, the cooling water remaining in the pump may boil with
an inner pressure increase, causing damage to the cooling water pipes.
Supply cooling water until the pump temperature becomes low.
4.4 Installation of Silencer
To reduce the pump exhaust noise, a silencer can be installed.
If you use a silencer, read the instructions manual of the silencer too.
Applicable silencer combination list
Vacuum pump
GR60 GR90 GR180
Applicable silencer RS-01 RS-01 RS-02
Silencer
WARNING
WARNING