Ulvac GR60, Инструкция по эксплуатации

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Instructions Manual － Multiple Roots Type Dry Pump GR60/90/180
YK09-0023-DI-003-02
17
3.5 Nitrogen gas pipe
The pump nitrogen gas port is Rc 1/4. Connect to the nitrogen gas pipe using an appropriate joint.
Nitrogen gas
Supply pressure MPaG 0.1 - 0.5
Adjusting pressure
*2
MPaG 0.05-0.10 （ During operation ）
Gas flow rate SLM
5.0 ※
1
*1: The flow rate of nitrogen gas (= Shaft seal gas) is 5.0 SLM constant.
*2: Pressure meter value adjusted by regulator
(1) It is designed to prevent leakage under specified conditions and
a leak test is performed. However, any abnormal conditions
outside the range of the specifications (such as an abnormal
pressure increase) may cause leakage.
(2) Attach a feed valve to stop the supply of Nitrogen gas.
(3) Before removal of the nitrogen gas pipes, close the feed valve of
nitrogen gas.
(4) The pipe on the device side has residual pressure. Install a
pressure gauge in the nitrogen supply source of the device (on
the way to the pump in the pipe) and check that the pressure
decreases down to the atmospheric pressure, before removing
the nitrogen gas pipes. If the inner pressure is high during the
work, there is a risk that the pipes may be disconnected with
force and you may get injured.
[Reference] Nitrogen Gas Piping Recommended System
CAUTION
Feed valve
This system needs to
be prepared at your
own responsibility.
Nitrogen Gas
Piping Inlet port
Pressure
meter
This product