Ulvac GHD-031A, Инструкция по эксплуатации

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For safe operation
1.1
Hazards peculiar to the pump and safety measures
Before operating or inspecting the pump, read this section carefully to fully understand
potential hazards and prevention methods.
The pump is not to be used with toxic of flammable gases.
1.1.1 Leakage of dangerous gas and material
Cause Prevention method and measures
Injury due to touching toxic pump
oil in the pump or harmful
substances attached to the pump
during inspection or disposal.
① Before overhauling and disposing of the
pump, ask a waste disposal specialist to
make it safe.
② Ask an authorized waste disposal
specialist to carry out disposal.
This pump is for dry air or dry nitrogen absorption of the inert gas. This pump
cannot absorb poisonousness and flammable gas. Leak from the main body of pump
and, as well as the vent of the pump, is very in danger.
1.1.2
Cause Prevention method and measures
① When connecting electric wires, always
turn off the power and be sure to connect
the earth wire.
The energized part of the motor was
touched.
② When inspecting and transferring the pump,
always turn off the power.
Arrange wires correctly in accordance with the “Electrical Equipment Technical
Standard” and “Wiring Regulations.” Incorrect wiring may result in fire.
Danger
Danger
Warning
Caution
Electric shock