Ulvac GHD-031A, Инструкция по эксплуатации

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6.4
Trouble check list
Table5. Trouble check list
Problem Cause Measures Reference
①
The pump is not connected to the
power supply.
①
Connect the pump to the power
supply.
３．４
②
The power switch is not turned
on.
②
Turn on the power switch.
４．２
③
Problem with power supply
voltage.
③
Set the power supply voltage to
within ±10% of the rated
voltage.
３．５
④
The overload protector has
actuated.
④
Wait till the temperature goes
down to 76
±
15
℃
.
４．５
⑤
The motor malfunctions.
⑤
Replace the motor.
６．２
⑥
Low ambient temperature has
increased the oil viscosity.
⑥
Increase the ambient
temperature to 7
℃
or more.
４．４
⑦
The entrance of foreign matter
into the pump caused the rotor
to burn out.
⑦
Overhaul (replace the cylinder
and rotor).
６．２
⑧
Moisture or solvents were
sucked in, forming rust inside
the pump.
⑧
Overhaul (replace the cylinder
and rotor).
６．２
⑨
Reaction product accumulated in
the pump when the pump stops
after exhausting reactive gas.
⑨
Overhaul (cleans the pump
inside and removes reaction
products).
６．２
⑩
Water absorption expands the
vanes.
⑩
Overhaul (replace the vanes).
６．２
The pump does not
rotate.
⑪
Components inside the pump
have burnt out.
⑪
Overhaul (replace the damaged
components).
６．２
①
Problem with power supply
voltage.
①
Set the power supply voltage to
within ±10% of the rated
voltage.
３．５
②
Defective wiring to the pump.
②
Perform wiring to the pump
again.
３．４
③
Low ambient temperature has
increased the oil viscosity.
③
Increase the ambient
temperature to 7
℃
or more.
４．４
The pump’s
rotation is unstable.
④
Foreign matter has entered the
pump.
④
Disassemble and clean the
pump to eliminate foreign
matter.
６．２