Ulvac GHD-031A, Инструкция по эксплуатации

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Maintenance, Inspection and Repair
6.1
Maintenance
Check the following during operation at least once every three days.
(1) Is the amount of the pump oil in the range of the red circle of the oil level gauge?
(2) Does not the vacuum pump oil discolor?
(3) Is not an abnormal sound done?
(4) Is not abnormality found in the value of the current of the motor?
(5) Is not there the oil leak?
If there is any problem, take proper measures in accordance with “6.4 Trouble check list.”
6.2
Periodic inspection
The items to be checked should be changed as necessary depending on the environment
where the pump is used. However, always check the following in order to prevent a
malfunction and to lengthen the service life of the pump.
Pulled out the power plug before starting inspection and do not turn it on while
inspection is in progress. Doing so will result in injury.
The pump is very hot immediately after it is stopped. Wait for 10 minutes until
the pump has cooled down completely and then start inspection. There is a risk of
burns.
(1) Periodic replacement of the pump oil
The pump oil deteriorates with operation. Check the viscosity and level of
contamination of the pump oil with the oil level gauge, and replace the pump oil
in good time.
If the pump oil is replaced periodically, the deterioration of the pump oil is
minimized and the service life of the pump is lengthened.
If operation is continued with a lot of moisture mixed with the pump oil, the
ultimate pressure will not reach the standard value, the movement at the section
where the mechanical friction is generated becomes slow, and the pump finally
becomes damaged. Replace the pump oil in accordance with “6.3 Replacement of the
pump oil.”
Caution