Ulvac GHD-031A, Инструкция по эксплуатации

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Table 4. Periodic inspection table
Frequency Item Measures Details Measures
Amount. Refill the oil.
Oil
Color (Reddish brown, dark blown,
and cloudy white are not good.)
Replace the oil.
Sound Abnormal sound.
Vibration Abnormal vibration.
Check nuts and bolts for looseness.
If not clear, contact us.
Once/3 days
Current value Difference from the rated value.
Check the cause of an overload.
If not clear, contact us.
Surface
temperature
Surface temperature
(The temperature higher than the
room temperature by 40K or more is
abnormal.)
Check the cause of an overload.
If not clear, contact us. Once/week
Oil leakage Oil leakage from the plugs. Replace seals, or contact us.
Once/
3000hours
or
once/6 months
Oil Clogged with dust. Replace the oil.
When requesting the manufacturer’s service department to overhaul the pump, always
write the type of the vacuumed gas on the “Pump Usage Check Sheet” attached at
the back of this manual and submit it. Note that if toxic gases are exhausted, both
the pump itself and pump oil will become contaminated. Please be sufficiently aware
that use with some gases will preclude overhaul.
Warning