background image

 
 

 

 

10 

(5)  Withdraw the connecting tube from the valve retainer, and disassemble the left and right 

pump heads. See Photo 5.

 

 
 
 
 
 
 
 
 
 
 

                 

Photo 8

                       

  Photo 9

               

  Photo 10 

(6)  When one diaphragm is pushed downwards (to bottom dead center), the other 

diaphragm rises (to top dead center). It is then possible to grip the edge of the 
diaphragm. See Photo 8. 

(7) 

While holding the edge of the diaphragm, turn it in the anti-clockwise direction and 
remove it. See Photo9. Remove the other diaphragm in the same way. 

 

Note: Use two persons to grip the diaphragm if it is difficult to remove. 

 

Note: A spacer (washer) is inserted between the diaphragm and connecting rod. Ensure 

 

 

that this spacer does not fall into the pump. See Photo10. 

 

Note: The connecting rod may drop into the pump. 

   

   

After removing the diaphragm, insert a hex head bolt (M6x25) into the tapped 

 

portion of the connecting rod to hold the pump head cover in place. 

(8)  Clean the tapped portion of the connecting rod by wiping with a cloth impregnated with 

solvent. 

(9)  Apply a small amount of vacuum 

grease to the threads on the new 
diaphragm, and to the spacer, and 
screw it onto the connecting rod 
clockwise. See Photo 11. 

 

Note: Check that the spacer

see 

Photo 10

removed in (7) is returned 

to its original position. 

 

 

 

 

 

 

 

 

            Photo11 

 

Note: To prevent wrinkles in the PTFE sheet, hold the diaphragm and fit it firmly as 

 

shown in Photo 11 

(10) Fit the other diaphragm in the same way. 
 

 
 
 
 
 
 
 
 
 

     

             

Photo 12

                             

Photo 13 

(11) Apply a small amount of vacuum grease over a distance of 5mm at both ends of the 

connecting tube, and place the tube fully over the nipples to connect the two pump head 
covers. See Photo 12. 

(12) Place the connected pump heads over the casing, and bolt in place with hex socket 

head bolts (M6x25). 

 

Note: Ensure that the pump heads are in the correct orientation. See Photo 13. 

 
 
 
 

Diaphragm

 

Bottom dead center 

Top dead

 

center 

× 

Bad 

Edges up 

○ 

Good 

Almost flat 

Spacer 

Connecting rod 

Hex  socket  head 
bolts   

(M6x25) 

  Fan 

Switch 

Содержание DTC-22

Страница 1: ...to Users Please read this manual thoroughly to ensure safe and effective use of the equipment Keep this manual in a safe place Due to periodic improvements in performance the equipment described in t...

Страница 2: ...hecking Operation After Installation 4 3 5 Piping 5 3 6 Storage 5 4 Cautions for Operation 5 4 1 Cautions for Operation 5 4 2 Operation of the Thermal Protection Relay 5 4 3 Precautions when starting...

Страница 3: ...sions 3 Fig 3 1 Example of Piping Used When Evacuating a Vessel 5 Table 1 1 DTC 22 Product Specifications 2 Table 1 2 DTC 22K Product Specifications 2 Table 6 1 Consumables List 7 Table 6 2 Locations...

Страница 4: ...quipment correctly Read the section on Safe Use particularly closely Keep This Manual in a Safe Place After reading this manual be sure to keep it in a safe place which is readily accessible to others...

Страница 5: ...ached to power cord x 1 It is attached only to 100V in the motor ratings voltage 3 Is the pump damaged in any way 4 Are any external screws or inlet and outlet pipes loose Are any components missing C...

Страница 6: ...y to the operator Incorrect handling of the equipment may result in death or serious injury to the operator Incorrect handling of the equipment may result in light or medium injuries to the operator o...

Страница 7: ...cking or repairing the pump Failure to do so may result in electric shock or the pump suddenly starting and causing injury 5 Ensure that the relevant wiring is in accordance with technical standards f...

Страница 8: ...rage installation and operation 1 Ambient temperature of 0 40 C and maximum relative humidity of 85 during operation 2 Other conditions for storage and operation a Level floor of sufficient strength b...

Страница 9: ...shocks or tipped over on its side 2 Do not hold or push the tube at the top of the pump see below Damage to the tube may affect performance of the pump Applications 3 This pump is not designed to be c...

Страница 10: ...of 40 C Use at high ambient temperatures will dramatically reduce the life of the pump 10 Back pressure at the outlet while the pump is starting may overload the motor 11 The thermal protection relay...

Страница 11: ...is pump is designed for general corrosion resistance however it is not resistant to molten alkali metals such as molten sodium to fluorine at high temperatures and to some oxides of fluorine 4 Corrosi...

Страница 12: ...istance to the tip of the intake or exhaust pipe 142mm W 272mm L 202mm H Voltage Category Pollution Degree Table 1 2 Product Specifications Model DTC 22K Discharge rate 50Hz 20L min 60Hz 24L min Press...

Страница 13: ...if the motor temperature rises due to a pump fault which prevents rotation or if load becomes excessive 2 It is recommended that additional protective devices eg earth leakage breaker motor breaker b...

Страница 14: ...l dust and humidity This location should be selected in consideration of ease of installation and removal inspection and cleaning Particular attention should be paid to ambient temperature when fittin...

Страница 15: ...en evacuating a vessel ensure that a shut off valve is placed between the pump inlet pipe and the vessel see Fig 3 1 Fig 3 1 Example of Piping Used When Evacuating a Vessel 3 6 Storage Turn the switch...

Страница 16: ...ure achieved as employed in the catalogue and in this manual is defined as the minimum pressure obtained by the pump without introduction of gas from the pump inlet ie the no load condition Note that...

Страница 17: ...lean in accordance with the Replacement and Cleaning Guide on the following page Refer to 6 4 Replacing and Cleaning Consumables for procedures Request replacement by the manufacturer s service divisi...

Страница 18: ...ing and Cleaning Consumables See Caution 11 P06 Always use a mask and gloves when replacing components to prevent ingestion of microscopic particles resulting from wear of components Use the following...

Страница 19: ...he pump head as shown in Photo 4 Note Gripping or bending the connecting tube will damage it and reduce performance of the pump Note After removing the pump head lay it on a soft cloth Note There is a...

Страница 20: ...ump head cover in place 8 Clean the tapped portion of the connecting rod by wiping with a cloth impregnated with solvent 9 Apply a small amount of vacuum grease to the threads on the new diaphragm and...

Страница 21: ...opposite pairs to a torque of 11Nm Note Confirm the thing that the pump head spacer has been inserted in the interior Photo 15 and 16 Photo 15 Photo 16 15 Position the top panel and fix it in place wi...

Страница 22: ...5 Fit the new inlet and outlet valves Note Ensure that the valves are fitted correctly as shown in Photos 18 and 19 6 Fit the valve retainers to the pump heads Note Ensure that the inlet and outlet v...

Страница 23: ...s 1 2 2 Remove the O rings See Photos 20 21 22 3 Clean the inlet and outlet pipes pump heads and valve retainers with solvent 4 Lubricate the entire surface of each O ring with a light coating of vacu...

Страница 24: ...amaged components 6 4 Pressure does not diminish 1 Pump is too small for capacity of vacuum vessel 1 Select another pump 2 Pressure measurement is incorrect 2 Measure the pressure correctly 5 1 3 Vacu...

Страница 25: ...e and inspection etc d Malfunctions caused by modifications or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused...

Страница 26: ...Industrial Safety and Health Law designates particular substances as the materials to be notified 2 Usage Status Operation Method Approx hours per day years and months Continuous Operation Intermitte...

Страница 27: ...6 6397 2286 ULVAC KIKO Inc https ulvac kiko com en Please contact us for products Service Base or other Inquiries from here ULVAC Inc Components Division 2500 Hagisono Chigasaki Kanagawa 253 8543 Japa...

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