Ulvac C10T, Инструкция по эксплуатации

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Maintenance
6-2
ULVAC CRYOGENICS INCORPORATED
CAUTION
◇
We recommend that you use a regulator for helium gas (left screw) which shows the
range of 4 - 6 MPaG at lower pressure side.
◇ The gas charge inlet of the compressor unit is 1/4B male flare.
◇
Use helium gas with purity of 99.999% or more.
Charge helium gas as follows:
1. When mounting the regulator on a new helium bottle, perform the following procedures in
order to purge the air and fill helium gas in the gas line between the regulator and the
bottle valve.
ａ．
Open the regulator a little. Normally, the regulator can be opened by turning the handle
clockwise.
ｂ．
Slowly open the bottle valve, and purge the air in the gas line for several seconds.
ｃ． Close the regulator.
If the bottle valve is opened ignoring the above procedures (1), the air between the regulator
and the bottle valve diffuses into the helium bottle and lowers the purity of helium gas.
2. Remove the front panel of the compressor unit.
3. Connect the helium charging hose as follows:
ａ． Connect the charging hose to the regulator.
ｂ．
Loosely connect the charging hose to the charge inlet on the compressor unit to allow
slight amount of helium gas to escape.
ｃ．
Open the regulator until the outlet pressure reaches 0.1 to 0.2 MPaG. Allow helium gas
to flow out from the charging hose for about half a minute. Meanwhile, open the
charge valve slightly in order to drive out the air that exists between the charge valve
and the charge inlet.
ｄ．
Tighten the flair nut at the end of charging hose and close the charge valve. Helium gas
charge in the line between the regulator and the charge valve on the compressor has
been completed.
4. Adjust the low pressure side of the regulator at 1.8 MPaG.
5. Open the charge valve slowly and perform the following instruction according to the state
of the compressor.
a.
If the compressor unit is running under normal operating conditions, replenish it
with the pure helium gas until it reaches the operation pressure shown in table 1-1
in this instruction manual.