Ulvac C10T, Инструкция по эксплуатации

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MDIW001E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1
Do not disassemble, pressurize, heat up a compressor unit, or throw it into fire.
Such actions may lead to explosion of the adsorber inside the compressor unit.
For safe disposal of an adsorber, follow the procedures below.
(1)
Remove high pressure helium gas inside the adsorber to reduce the internal
pressure to the level of ambient atmospheric pressure. To do so safely, use tools
appropriate to the adsorber coupling such as our charging adaptor (for cryocooler
maintenance).
(2)
Remove the coupling to make it visible that the adsorber has been depressurized
before proceeding to the next step.
Disposal Considerations
Disposal of our products must be done in accordance with applicable national and local
laws and regulations.
The cryopumps or cryocoolers may contain residue of hazardous substances resulting
from actual use. Contact your safety supervisor and follow the instructions to remove
such toxic substances before disposing
We provide Safety Data Sheet (called SDS) of our products upon your request.
Please contact us if necessary.
WARNING
WARNING