Ulvac C10T, Инструкция по эксплуатации

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C10T Compressor Instructions
Table of Contents
Safety Instructions ························································································ S-1
Disposal Considerations ················································································ IW-1
1. COMPRESSOR UNIT DESCRIPTION ·························································· 1-1
1.1 General ··························································································· 1-1
1.2 Specifications ··················································································· 1-1
2. INSPECTION ·························································································· 2-1
2.1 Shipping List ····················································································· 2-1
2.2 Compressor ····················································································· 2-2
2.3 Connecting Piping (Flexible Hose) ························································· 2-2
2.4 Cables ···························································································· 2-2
3. INSTALLATION ······················································································· 3-1
3.1 Installation························································································ 3-1
3.2 Connecting Cooling Water Piping ·························································· 3-2
3.3 Cooling Water ··················································································· 3-2
3.4 Connecting the Compressor Unit to the Cryopump ···································· 3-5
3.5 Connecting Electrical Cables ································································ 3-7
4. OPERATION ··························································································· 4-1
4.1 Before Operation ··············································································· 4-1
4.2 Normal Operation ·············································································· 4-1
5. Disconnection and Storage ········································································ 5-1
5.1 Disconnecting Flexible Hose ································································ 5-1
5.2 Storage ··························································································· 5-2
6. MAINTENANCE ······················································································ 6-1
6.1 Scheduled and Unscheduled Maintenance ·············································· 6-1
6.2 Charging Helium Gas ········································································· 6-1
Appendix A Trouble Shooting ··········································································· A-1
Appendix B Schematic Diagram ······································································· B-1
Appendix C Flexible Hose ··············································································· C-1
Appendix D Flow Diagram ··············································································· D-1
Customer Support / Service Office ·································································· CS-1
ULVAC CRYOGENICS INCORPORATED I