Ulvac C10T, Инструкция по эксплуатации

Страница: 37 / 56

Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 6-1
6. MAINTENANCE
6.1 Scheduled and Unscheduled Maintenance ............................................ 6-1
6.2 Charging Helium Gas ............................................................................. 6-1
Always disconnect the compressor from all sources of electrical power before
performing any maintenance procedures.
6.1 Scheduled and Unscheduled Maintenance
◇
Scheduled Maintenance
：
Not necessary
◇
Unscheduled Maintenance
：
Adding helium gas
6.2 Charging Helium Gas
■
Note
■
When charging helium or performing helium circuit decontamination, equipments
(regulators, charging hoses, adopters, etc.) that can be used at 2.0MPaG or above are
required.
If the helium pressure gauge of the compressor unit shows 0 MPaG, contamination
caused by air or moisture may occur in the system. If it occurs, contact our Service
Engineering Division or customer support center.
When the gas pressure is lowered, it is necessary to charge helium. Investigate the cause of
the pressure reduction before adding helium gas. If there is a leakage, take an adequate
measure before charging. Improperly connected self-sealing coupling might be one of the
causes of the leakage.
WARNING
CAUTION