Ulvac C10T, Инструкция по эксплуатации

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Compressor Unit Instruction Manual
MD05001E,2010.06 ULVAC CRYOGENICS INCORPORATED 5-1
CAUTION
5. DISCONNECTION and STORAGE
5.1 Disconnecting Flexible Hose .................................................................. 5-1
5.2 Storage.................................................................................................... 5-2
5.1 Disconnecting Flexible Hose
When disconnecting flexible hoses, be sure to use the two single open end spanners with
width across flat 26mm and 30mm.
.
１．
Shut down the compressor unit.
２．
After the super trap and/or cryopump (refrigerator unit) has been warmed up to
room temperature, disconnect the flexible hoses.
・
If removing the flexible hoses before the refrigerator reaches room temperature,
helium gas shut up into the refrigerator increases pressure with the rise of
temperature, and may blow off from a pressure relief valve finally. It might cause a
helium leakage also.
・
However, only when carrying out helium circuit decontamination procedures for the
refrigerator unit, disconnect the flexible hoses from helium gas supply and return
connectors at the compressor unit side right after shutdown.
CAUTION