Thermo Scientific Barnstead GenPure with xCAD
Ultrapure water system
23
8.6 Flow chart, GenPure UV-TOC/UF with xCAD
A-F1 Filter
cartridge
A-F2 Sterile
filter
A-F3 Ultrafiltration
module
A-P1 Circulation
pump
A-UV1 UV-Photooxidation
FIS400 Digital
flowmeter
QIA 300
Conductivity, feedwater
QIA 301
UV-Intensity
QI 302
Conductivity, TOC measurement
QIA 303
Conductivity, ultra pure water
TIA 500
Temperature sensor
V1 Pressure
reducer
V2 Check
valve
V3 Solenoid
valve
V4
Rinsing solenoid valve
V5
Check valve 1 bar