Tescan MIRA3, Инструкция по эксплуатации, Страница: 5 / 49

Introduction
3
MIRA3 FEG-SEM
1 Introduction
The MIRA3 series is a family of high-quality; fully PC-controlled scanning electron
microscopes equipped with a Schottky Field Emission electron gun designed for high vacuum
or variable pressure operations.
The most important features of the microscope are:
 High brightness Schottky emitter for high-resolution/high-current/low-noise
imaging.
 Unique three-lens Wide Field Optics
TM
design offering the variety of working and
displaying modes embodying the Tescan proprietary Intermediate Lens for the beam
aperture optimization.
 Real time In-Flight Beam Tracing
TM
for the performance and spot optimization
integrating the well established software Electron Optical Design
.
 A powerful In-Beam detector of secondary electrons located in the objective lens
enabling work at very short working distances for high resolution.
 Fast imaging rate.
 High-throughput large-area automation, e.g., automated particle location and
analysis.
 Fully automated microscope set-up including electron optics set-up and alignment.
 Sophisticated software for SEM control, image acquisition, archiving, processing and
analysis.
 Network operations and built-in remote access/diagnostics.
This manual provides an overview of the components, the operational principles and the use
of MIRA3 scanning electron microscopes. Not all parts of this manual may apply to a given
installation nor should be taken laterally in all cases. Details of the MiraTC software may also
vary according to the actual setting and thereby differ slightly from what is shown in the
figures.
Since MIRA3 is installed and maintained by trained specialists, technical details and
installation procedures are limited to a short overview. In case of necessary maintenance,
reinstallation, hardware changes, etc. the appropriate service authorities or your local
supplier must be contacted for further assistance and instructions.