Description of the Microscope
15
MIRA3 FEG-SEM
Figure 1
3.
Use the Adjustment >>> Auto Gun Centering function in the Electron Beam panel
(Figure 1).
4.1.2.2
Automatic Centering
The automatic procedure of column centering is very fast and suitable for low
magnifications. For very precise work at high magnifications the manual centering is more
suitable (see chapter 4.1.2.3).
1.
Insert the centering specimen.
2.
Set up the recommended working conditions and focus the image in RESOLUTION
mode.
3.
Use the Adjustment >>> Auto Column Centering function in the Electron Beam panel
(see Figure 1).
4.1.2.3
Manual Centering
1.
Insert the centering specimen.
2.
Set up the recommended working conditions and focus the image in RESOLUTION
mode.
Note: Manual centering is for experienced users and it is necessary to perform it individually
for each from four HV indexes and keep to described sequence for each procedure. The
RESOLUTION mode must always be adjusted first.
Note: If working at a higher magnification and precise centering is needed, the manual
centering procedure should first be done at a lower magnification and repeated more
precisely at higher magnification.
Note: In the case of MIRA3 with InBeam detector check the item InBeam Mode in the main
SEM menu.
3.
Use the Adjustment >>> Manual Column Centering function in the Electron Beam
panel (see chapter 8.5). Press Next>> button. The image starts wobbling, that is,
periodically changing the working distance.
4.
Minimize the image movement by changing the OBJ Centering (select in the Pad
panel) using the trackball and F11 and F12 keys. Press the Finish button.
It might also be necessary to have FIELD or DEPTH modes precisely centered if working
at higher magnifications. If needed proceed with the following steps:
5.
Switch to FIELD mode. Set the same magnification for RESOLUTION and FIELD modes.
Use the Adjustment >>> Manual Column Centering function in the Electron Beam
Содержание MIRA3
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