Getting Started
31
MIRA3 FEG-SEM
2.
Select the accelerating voltage (20 kV recommended) using combo box in the Electron
Beam panel (Figure 10).
Figure 10
3.
Clicking on the BEAM ON button in the Electron Beam panel turns the electron beam
on (Figure 11).
Figure 11
4.
Right-click in the SEM Scanning window to open menu and select the Minimum
Magnification function (Figure 12).
Figure 12
5.
Right-click in the SEM Scanning window to select the Auto Signal function to set
brightness and contrast (Figure 12).
6.
Select RESOLUTION mode (click on the Scan Mode function in the Info Panel
(Figure 15) and select RESOLUTION or use the Continual Wide Field option – switches
automatically between WIDE FIELD and RESOLUTION mode and vice versa when
increasing or decreasing magnification).
7.
Focus the image by clicking on the WD icon
in the Toolbar and turning the
Trackball from left to right (or vice versa). Alternatively use the Auto WD function for
focusing (see Figure 12). Double-clicking (left mouse button) in the SEM Scanning
window opens the Focus window. To remove the Focus window double-click
anywhere in the SEM Scanning window.
Содержание MIRA3
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