Tescan MIRA3, Инструкция по эксплуатации, Страница: 41 / 49

Getting Started
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MIRA3 FEG-SEM
Figure 27
5. Open the DrawBeam panel (see Figure 27).
6. Create a new DrawBeam project by cklicking on the icon in the DrawBeam panel.
The Project settings panel will appear (Figure 28). Select the properties of the grid
and of the write field and click on the Ok button. The Create new layer panel will
appear (see Figure 29). Choose the properties of the layer and select the E-Exposition
process. Additional layers can be created by clicking on the icon
in the
DrawBeam panel.
7. Click on the icon to display the grid in the drawing window in the DrawBeam
panel.
8. Click on the Create new filled rectangle button in the DrawBeam panel and
draw the square in the drawing window. When clicking on the object (Filled rect 1)
in the Objects editor or in the drawing window, variable values describing the object
will appear in the Selection Properties table in the DrawBeam panel (see Figure 30).
9. Open the Select pattern type panel by clicking on the icon in the DrawBeam
panel (Figure 31 (a)) and select Mesh object to open the Create mesh object panel
(Figure 31 (b))