FC-3800 Facility and Installation Guide Section 3: Unpacking and Installation
0101-8604-0, Rev. F
3-5
FC-3800 F & I Guide
Compressed Gases (supplied to vacuum cubicle):
Vent gases (CDA or N
2
)
Pneumati c air
Optional process gases
Exhaust Gases:
Vacuum cubicle to facility exhaust
Mechanical pump to facility exhaust
Electrical Connections:
In 208-V installations, connect power Drops #1 and #2 to the power distribution
box, as shown in Figure 3-4. In 400-V installations, connect Drop #1 to step-down
transformer and Drop #2 to power distribution box, as shown in Figure 3-5.
NOTICE
Equipment power connections and pump rotation checks
shall be performed only by or under the supervision of an
on-site Temescal service representative.
Please refer to the terms of your warranty.
3.3
Temescal Installation Responsibilities
3.3.1 Helium Circuit Recharging
During shipment, all cryopump lines are charged with Helium at 250 psig (17.24 torr) to
protect the integrity of the system, particularly the cryopump, from contamination.
However, if the system must be air-shipped during any part of the transit, the Helium
pressure must be reduced to a maximum of 15 psig (1.03 torr) prior to shipment, in
accordance with U. S. Federal Aviation Agency regulations.
During the installation of any such Temescal system, the Temescal service
representative will be responsible for recharging and decontaminating the Helium lines
and the cryopumps. Thereafter, the customer will be responsible for maintaining the
integrity of the system.
In such cases, the cryopump must be recharged with 99.999% pure Helium to 250 psig.
Such customers should therefore have on hand at least one standard bottle of 99.999%
pure Helium. The Temescal service representative will have the required equipment and
tools, as specified in Table 2 of CTI Cryogenics’
On-Board
®
Cryopump Installation and
Maintenance Instructions
(Helix document 8040491, Revision 102, dated 2/3/04). Helium
recharging and decontamination procedures must be performed in strict accordance with
the instructions in Chapter 4 of that manual.
3.3.2 Making the Remaining Service Connections
It is the responsibility of an authorized Temescal Field Service Technician to install the
tetrode tube (Simba 2 power supply only) and to make the connections specified below.
DANGER: HIGH VOLTAGE
Before connecting power lines to any system
components, service personnel should ensure that
all switches and controls are in the OFF position.
