0101-8604-0, Rev. F
2-1
FC-3800 F & I Guide
2 Facility Requirements
This section of the Guide specifies the requirements for the various facilities services,
including:
Environment (subsection 2.1)
Water (subsection 2.2)
Compressed gases (subsection 2.3)
Electrical power (subsection 2.4)
Electrical grounding (subsection 2.5)
The customer is responsible for properly preparing the site for the delivery, installation,
and operation of the system ordered. Site preparation includes providing properly rated
power, water, air, compressed gases to their appropriate facility termination points.
Before system installation can be scheduled, site preparation must be completed, and the
Site Preparation Checklist (see Section 1.4) must be completed and returned to
BOCE/Temescal.
2.1 Environment
Ambient Air Temperature: 55º F to 90º F (12º C to 32º C)
Relative Humidity:
50% maximum
; must be free of corrosive fumes and vapors
Air Conditioning:
Capable of 5 kW cooling
2.2 Water
Both cold and hot water must be filtered to 50 microns. In addition, the water supplied to
the system must have a ph level of between 6.0 and 8.0. To prevent hard water deposits,
it must be conditioned to maintain a calcium carbonate (CaCo3) content of less than 75
ppm. Actual water-flow requirements may vary, depending on your system and its
components.
2.2.1
Cold Water
Note: Condensation on water lines can impair the performance of the
equipment and cause damage. Therefore, the cold water temperature should
not exceed the dew point.
Cold Water Supply #1 (Vacuum cubicle)
Filtered to 50 microns
Maximum inlet pressure
100 psig (6.89 bar)
Minimum delta pressure
50 psig (3.45 bar)
Maximum inlet temperature
68° F (20º C)
Flow Rate Requirements
Chamber walls and doors
5 gpm (18.9 L/min)
Each e-beam source
2.75 to 5 gpm (11.4 to 18.9 L/min)
5-cm ion beam source
0.5 gpm (1.9 L/min)
Each crystal monitor
0.5 gpm (1.9 L/min.)
