Section 1: Introduction and Site Prep. Checklist
FC-3800 Facility and Installation Guide
FC-3800 F & I Guide
1-2
0101-8604-0, Rev. F
1.3
General Safety Information
Specific guidelines concerning Guidelines & Practices, Operating Safety Instructions, and
warnings concerning High Voltage and Health Hazards can be found in the front of this
F&I Guide, as well as in the fronts of the Operations and Service Manuals. Additional
safety warnings may also be found in the various component manuals and third party
documentation. You will also find throughout the text of these manuals, WARNING boxes
that advise of safety concerns. An example of such a warning box appears below.
This equipment contains electrical and electronic interlocks and alarms, to protect
personnel from injury. DO NOT DEFEAT, OVERRIDE, OR BYPASS THESE
PROTECTIVE DEVICES! When the TCS is in Service Mode, numerous safety interlocks
are bypassed.
These safety warnings and notices are not only for the protection of the people who
operate or maintain the equipment, but also for the equipment itself. Failure to comply
with these safety standards can cause serious injury or death, and significant damage to
the equipment.
BEFORE OPERATING ANY EQUIPMENT, READ ALL OPERATOR MANUALS,
SAFETY NOTICES AND WARNINGS AND COMPLY WITH THEIR GUIDELINES.
1.4
Site Preparation Checklist
The customer is responsible for providing properly rated power, water, air, and gases
services to their appropriate termination points at the System prior to installation.
Specific requirements and installation specifications required for each system are
detailed in this Facilities and Installation (F&I) Guide.
The customer is also responsible for meeting all applicable facility, electrical and safety
codes in routing power, water, air, and gas lines to and between the modules of the
system. For more specific details, please read the remainder of this Facilities &
Installation (F&I) Guide. If you have any questions concerning your installation, please
feel free to call Temescal Customer Support (1-800-522-1215, ext. 2891).
Please complete the Site Preparation Checklist on the next page, checking off each
requirement as it is completed. Sign and date the completed Checklist and fax it to
Temescal (925-449-4096), Attn: Customer Support Coordinator. When Temescal
receives the completed checklist, the installation date for your system will be scheduled.
WARNING
LETHAL VOLTAGES PRESENT
Residual Voltages can be present in numerous parts of the
equipment, even after the source power has been switched
off. Before touching the source tray or the electron beam gun,
you MUST use a properly connected ground hook to touch all
accessible vacuum cubicle parts that could be charged with
high voltage.
