FC-3800 Facility and Installation Guide
Section 1: Introduction and Site Prep. Checklist
FC-3800 F & I Guide
1-3
0101-8604-0, Rev. F
(FC-3800)
SITE PREPARATION CHECKLIST
The Customer is responsible for providing properly rated power, water, air, and gases
services to their appropriate termination points at the System prior to installation.
Please
read this Guide for more specific details.
As each requirement is completed, place a check mark in the appropriate check box below. When
ALL requirements have been completed, sign and date this page, then fax this checklist back to
Temescal (925 449-4096), Attn: Customer Support Coordinator.
Environment
: For additional information, see section 2.1.
Ambient Air Temperature: 55ºF to 90ºF (12ºC to 32ºC),
Relative Humidity: 50% maximum
Air conditioning: Capable of 5 kW cooling
Water (conditioned):
For additional information, see section 2.2.
Cold Water Supply #1 (Vacuum Cubicle)
100 psig (6.89 bar) maximum inlet pressure
50 psig (3.45 bar) minimum delta pressure
50º–70º F (10º–21º C) maximum inlet temperature
Filtered to 50 microns
Flow Rate Requirements:
Chamber walls and doors 6.0 gpm (22.7 L/min.)
Each e-beam source
2.75 to 5.0 gpm (10.4 to 18.9 L/min.)
5-cm ion beam source
0.5 gpm (1.9 L/min.)
Each crystal monitor
0.5 gpm (1.9 L/min.)
Cold Water
Supply #2 (Cryopump Compressors)
Min./max. inlet pressure
30/100 psig (2.07/6.89 bar)
Inlet temperature
10º–30º C
Min. flow rate
2.75 gpm (10.4 L/min.) for each
compressor
Cold Water
Supply #3
For Edwards Model iGX100 and iGX3/100 pumps:
Min./max. inlet pressure
40/100 psig (2.77/6.89 bar)
Inlet temperature
10º–30º C
Min. flow rate requirements
Edwards Model iGX100
0.3 gpm (1.1 L/min.)
Edwards Model iGX3/100
0.6 gpm (2.2 L/min.)
For water requirements for mech. pumps other than those supplied
by Temescal, consult the manufacturer of the pump in question.
Optional Hot Water
90 psig (6.21 Bar) maximum inlet pressure
50 psig (3.45 Bar) minimum delta pressure
5 gpm (18.9 L/min.) flow rate
140° F (60° C) approximate temperature
Filtered to 50 microns
