Section 2: Facility Requirements
FC-3800 Facility and Installation Guide
FC-3800 F & I Guide
2-6
0101-8604-0, Rev. F
Figure 2-3 Low-Z Grounding Requirements on Systems Equipped
with a CV-6SLX or CV-12SLX Power Supply
2.5.3
Electron Beam Source Ground
To ensure a good ground between the electron beam source and the vacuum cubicle, the
following conditions must be met:
The base of the source and the surface on which it is mounted (usually the upper
surface of the source tray) must be clean and free of evaporated material.
The mounting surface must be made of nonmagnetic material.
The source must be securely bolted to the mounting surface.
2.5.4
Grounding Hooks
One grounding hook is provided at each of the following locations of the system where
high voltage may be present:
Inside the vacuum cubicle
On systems with CV-6SLX or CV-12SLX power supplies, inside the right-hand
door of the operator station
On systems with Simba 2 power supplies, on the side of the Simba 2 power
module