SUSS MicroTec Delta10TT, Руководство оператора и техническая документация

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INSTALLATION SITE
delta10 - dl/01-2005
3
7
3.2.5.1 Dimension Controller
3.3 Starting Up
According to customer preference the system is
started up by SUSS MicroTec Lithography service
or by the customer.
3.3.1 Assure prior to starting the system that all re-
quirements as per chapter 5.
The system is not protected against the in-
gress of water. Therefore, it should be in-
stalled in a dry place only, where it is
protected from humidity
3.3.2 Placing the Chuck
Particular chucks are required for taking the sub-
strate to the spinning process. Various types of
chucks are offered (e.g. with / without vacuum, disc
or cross version, with / without center pins etc.).
Warning!
The substrate is placed on the chuck. The
chuck is specially balanced – therefore to
handle very cautiously.
Fit the chuck with its guidance on the
motor shaft. Therefore put the guidance’s
long hole on the pin of the motor shaft.
Press the chuck firmly downwards. Be
aware that the guidance doesn’t get
wedged in the motor shaft and the pin is
fixed in the long hole.
3.3.3 Nivellieren
In order to achieve best proces results the unit has
to be brought into line and leveled properly at place