OPERATION
delta10 - Rev00 - dl/18-01-2005
5
4
celerates up to the rotation speed of process
step no. 2.
•
When the spinning process is over, the control-
ler turns automatically to start mode.
•
When the chuck is stopped open the cover.
•
Remove the wafer or the substrate.
•
You can interrupt the spinning process at any
time by pressing <STOP>.
5.4.3 Interrupting the Spinning Pro-
cess
Danger!
In case of a premature interruption of the
spinning process media surplus could re-
main on the substrate or on parts of the
machinery.
Before removing the substrate process
chamber and substrate have to be rinsed
carefully.
•
Press the red <STOP> button on the controller
•
Ar the display of the panel interface „STOP“ is
flashing in the display.
•
The chuck brakes with low ramp to „0“.
Warning!
After terminating a process by pressing
the Emergency Stopbutton, the system
has to be initialized again.
Содержание MicroTec Delta10TT
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