SUSS MicroTec Delta10TT, Руководство оператора и техническая документация

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OPERATION
delta10 - Rev00 - dl/18-01-2005
5
2
Each process step is made up of three process pa-
rameters Removing the processed substrate or wa-
fer.
5.1.2 Preparations
• Depending on used features and media special
preparations are necessary:
Make sure that the empty media waste
container or the media waste connection
(option)
Make sure that the system‘s exhaust is
switched on and functionally.
Make sure that vacuum supply is installed
5.1.3 Initalization
During initialization the moving parts of the system
are set to their basic (reference) position. Without
initialization operation of the system is impossible.
Initialization is enabled automatically when the sys-
tem is switched on.
5.2 Programming of Recipe-
Number
To program any recipe-no. (1-50), the following pro-
cedure is in case of need.
• Controller-set up with ON button
• After pushing the STOP-button, you will get the
digital „P“ (program)/1 ... (Numbers selectable to
your please).
• Confirm program-no. input with START button.
Parameter input for time, rotation and ac-
celeration can be programmed in single
step.
5.3 Programming of Process Pa-
rameters
When using a chuck with vacuum for sub-
strate of the of 4“ x 4“ or
ø
6“ the
max. rotation speed ...............4,000 rpm
When using chucks without vacuum the
max. rotation speed ................2,000 rpm
When programming of process parameters the ac-
tual settings are indicated in the digital display.
• Turn the main switch of the controller on <ON>
5.3.1 Programming Process Step 1
• Press the <STEP> button
Para-
meter
Description
Label Panel
Interface
Unit
1 Rotation
speed of the
chuck RPM 1/min
2 Acceleration Level
0=high
9=low
3 Time TIME Seconds