OPERATION
delta10 - Rev00 - dl/18-01-2005
5
3
Rotation speed
•
Press
or
in the <RPM> area.
•
The speed value is displayed.
•
The speed deviation under operation conditions
is
±
50
1
/min for speeds between 100 und
6.000 rpm.
Acceleration (ramp)
Initial acceleration:
From 0 (still) to the speed programmed for this step.
•
Press
or
in the <
> area.
The acceleration value indicates the time con-
sumed to reach the set rotation speed.
Value 9 = minimal acceleration
Value 0 = maximal acceleration
Values are:
These values are valid for speeds between 500 and
6,000 rpm.
Process time
•
Press
or
in the <TIME> area.
5.3.2 Programming Process Step 2
•
Press
or
in the <STEP> area.
•
Enter parameters as described for step 1.
•
Press <STEP>.
•
Enter parameters as described for step 1.
Save Parameter
•
For saving parameters press <STEP> or
<START>.
5.4 Operating the Spinning Pro-
cess
Danger!
Don't use toxic or dangerous media.
During spinning or drying of substrates
media evaporate and dangerous vapors
and fumes can be set free damaging
health or parts of the system.
Suitable exhaustion is required when pro-
cessing toxic or dangerous media.
The maximum rotation speed depends on
size and shape of the substrates and the
chuck.
5.4.1 Switching On the Controller
•
Switch the controller <ON>
5.4.2 Starting the Spinning Process
•
Open the cover of the spinning bowl.
•
Place the substrate carefully between the cen-
tering pins.
Danger!
Make sure that the substrate is placed
correctly between the centering pins.
•
Turn on the vacuum. The substrate is sucked in
by vacuum (not when using chucks with out vac-
uum).
•
Check the vacuum on the vacuum indication.
The minimum vacuum is -0.6 bar.
•
Press the <START> button.
•
The chuck acceleration and rotates with the
speed defined in the process step no. 1.
•
When the first process time is over the chuck ac-
Step
Time to rotation speed
0
500 ms
1
1.000 ms
2
1.500 ms
3
2.000 ms
4
2.500 ms
5
3.000 ms
6
3.500 ms
7
4.000 ms
8
4.500 ms
9
5.000 ms
Содержание MicroTec Delta10TT
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Страница 40: ...MECHANICAL DRAWINGS AND PARTS LIST delta10 Rev00 dl 18 01 2005 7 2 7 2 Vacuum coupling ...
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