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SUSS MicroTec Delta10TT, Руководство оператора и техническая документация

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                  TABLE OF CONTENTS

delta10_ dl/01-2005

 

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TABLE OF CONTENTS

1

SAFETY INSTRUCTIONS

2

PRODUCT DESCRIPTION  _____________________________________________ 1

2.1

Intended Use  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1

2.2

System Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2

2.2.1

BM Model Overview   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  2

2.2.2

TT Model Overview  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  3

2.3

Media Required for Operation  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4

2.4

System Configuration   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4

2.4.1

Main Components  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  4

2.4.2

Additional Components  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  4

2.5

Technical Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4

2.5.1

Dimensions  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  4

2.5.2

Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  4

2.5.3

Requirements   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  4

2.5.4

Noise Emission   . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  5

3

INSTALLATION SITE  __________________________________________________ 1

3.1

Transportation and Storage  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1

3.1.1

Operating Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  1

3.2

Installation  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1

3.2.1

Unpacking  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  2

3.2.2

Place of Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  2

3.2.2.1 Mounting the Spinning Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  2
3.2.3

Dimension BM-Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  3

3.2.4

Dimension T-Module. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  4

3.2.5

Mounting the Controller  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  6

3.2.5.1 Dimension Controller  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  7

3.3

Starting Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7

3.3.1

Placing the Chuck  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  7

3.3.2 Nivellieren  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

6

3.3.3 Connection Media Supply and Media Disposal  . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

6

3.3.4 Connecting to Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 

7

Содержание MicroTec Delta10TT

Страница 1: ...2 www suss com MANUAL OPERATOR TECHNICAL DOCUMENTATION Spin Coater Delta10TT AK 200 347 ...

Страница 2: ...2 5 1 Dimensions 4 2 5 2 Weight 4 2 5 3 Requirements 4 2 5 4 Noise Emission 5 3 INSTALLATION SITE __________________________________________________ 1 3 1 Transportation and Storage 1 3 1 1 Operating Conditions 1 3 2 Installation 1 3 2 1 Unpacking 2 3 2 2 Place of Installation 2 3 2 2 1 Mounting the Spinning Module 2 3 2 3 Dimension BM Module 3 3 2 4 Dimension T Module 4 3 2 5 Mounting the Control...

Страница 3: ...ecipe Number 2 5 3 Programming of Process Parameters 2 5 3 1 Programming Process Step 1 2 5 4 Operating the Spinning Process 3 5 4 1 SwitchingOn the Controller 3 5 4 2 Starting the Spinning Process 3 5 4 3 Interrupting the Spinning Process 3 5 5 Problem Solving 4 6 MAINTENANCE AND CLEANING _______________________________________ 1 6 1 Maintenance 1 6 1 1 Cover Closed Sensor 1 6 1 2 Emptying the Me...

Страница 4: ... 3 3 7 MECHANICAL DRAWINGS AND PARTS LIST ____________________________ 1 7 1 Drawing Whole Unit 1 7 2 Vacuum coupling 2 7 3 Parts List 3 TECHNICAL DOCUMENTATION 8 ELECTRICAL SCHEMATICS 9 CHUCK PROTOCOL SPIN SPEED PROTOCOL SYSTEM CHECKLIST ...

Страница 5: ...Operation 3 1 3 3 Electrical Hazards 3 1 3 3 1 Handling of Electronic Components 4 1 3 3 2 Electrical Drawer CI Box 5 1 3 4 Chemicals Hazards 5 1 3 5 List of Hazardous Materials 6 1 3 6 List of Items that become Solid Waste 7 1 3 7 Unintended Media Releases 7 1 3 8 Symbols Used on System 8 1 3 8 1 Caution Symbols 8 1 3 8 2 Command Symbols 8 1 3 9 Emergencies 8 1 4 Re Installation of System 8 1 4 1...

Страница 6: ...an im pending hazard while using the system Neglecting of instructions given in this documentation or on the system itself can result in severe personal injury of the op erator or of persons being close by The system other equipment or the envi ronment can be damaged as well Caution The word Caution combined with this or a more specific symbol indicates a pos sible hazard while using the system Ne...

Страница 7: ...ntion must be paid to the follow ing with regard to The technical data and information concerning permitted use assembly connection ambient and operating conditions specified in the cata logue order documentation instructions and in other product documentation The general erecting and safety regulations the local system specific specifications and re quirement the proper use of tools and transport...

Страница 8: ...utton Warning Never open a hotplate during a running processor or after a power failure Warning HMDS hotplates only In case of a power failure the hotplate cover may not be opened Instead after operating has been re established the hotplate has to be flooded with nitrogen and vacuum in order to remove the HMDS which is poisonous forced cleaning step 1 3 3 Electrical Hazards Danger Electrical hazar...

Страница 9: ...nd current rating will be used In case of insufficient grounding or of damaged ground conductor make sure that the system will be inoperable and secure it against unautho rized or unintentional operation Whenever it is likely that the system is no longer electrically safe make it inoperable and secure it against any unauthorized or unintentional op eration The system is likely to be electrically u...

Страница 10: ...Inflammable explosive toxic Do not inhale its vapors danger of suffocation Prevent electrostatic loading Keep away from ignition sources Do not smoke near the system Do not eat near the system danger of poisoning Do not touch Danger Process chemicals Inflammable explosive toxic Do not inhale its vapors danger of suffocation Prevent electrostatic loading Beware of ignition sources No not smoke near...

Страница 11: ...g the total amount of such solvents allowed at a fa cility Proper precautions must be taken in the storage use and disposal of the chemical which should be treated as hazardous material Warning Isopropyl alcohol IPA is flammable Use in well ventilated areas away from flames and sparks Avoid skin contact and breathing vapors Warning Flammable solvents can cause injury or death if ignited keep all s...

Страница 12: ...ailed and complete information about the safety installations the system is equipped with please refer to chapter 3 Items To Do Parts contaminated by resist Clean contaminated parts using corresponding solvent Therefore see respective Material Safety Data Sheet MSDS of the supplier Heavily contaminated parts Disassemble heavily contaminated parts Note Never clean heavily contaminated parts in or i...

Страница 13: ...please ob serve the following instructions Danger In case of an emergency immediately push the emergency stop button of the system and a wait complete stand still of the system within a safe distance Prior to checking of risk area operate the main switch and disconnect the system from mains and media supply i e com pressed air nitrogen cleaning medium and other Danger Reactivation of the system af...

Страница 14: ... Observe and consider the Material Safety Data sheet of the corresponding media Always wear safety goggles gloves and protective clothing when working with hazardous materials Note Ensure that drained liquid contaminated materials used chemicals etc are de posed of according to the applicable local and environmental laws and regulations 1 4 1 1 Separate materials Forward al used piping to a specia...

Страница 15: ...power and media supply prior to maintenance work Spinning chuck and dispense arm are switched off as soon as the safety door opens 2 Squeezing of hand or fingers when reaching to the rotating chuck Squeezing of hand or fingers while closing the cover lid Chuck stops when cover is open The safety door prevents parts from es caping 3 Burning of han dor fingers by touching substrate hotplate or cover...

Страница 16: ...boratories and research institutions large series productions in industrial clean room Danger The system is not suited or designed for any other applications than the ones stated above Any modification of the system requests manufacturer s prior consent as well as his confirmation in writing Danger Without proper protection the system is not suited for the application of explosive or hazardous che...

Страница 17: ... aluminium plate The vacuum indicator shows the vacuum bar if the vacuum switch is on The spinning bowl is covered by a transparent cov er which is manually operated The spinning motor stops whenever the cover is opened The controller is used to program and operate all system functions 5 1 No Denomination 1 Spinning bowl 2 Controller ...

Страница 18: ...PRODUCT DESCRIPTION delta10 Rev00 dl 18 01 2005 2 3 2 2 2 TT Model Overview 1 2 No Denomination 1 Power and vacuum inlet 2 Connection for waste air exhaust ...

Страница 19: ...amp 10 steps Up to 10 process steps Vacuum indicator Vacuum switchable 2 4 2 Additional Components Vacuum chuck Low contact chuck Adapter for media supply N2 blow off manually switchable 2 5 Technical Data 2 5 1 Dimensions Delta 10BM Mounting dimensions Spinning module Lenght 305 mm Width 305 mm Depth 285 mm without waste bottle 45 edges Controller Width 214 mm Height 108 mm Depth 320 mm Overall d...

Страница 20: ...operated without system connected When operating without exhaust system hotplates and other components installed may be ruined and media fumes may be set free Chemicals Chemicals to be provieded and applied by the user Danger When handling chemicals please observe relevant safety regulations as well as sup plier s instructions safety data sheet plus additional instructions 2 5 4 Noise Emission Noi...

Страница 21: ...When removing from storage prior to installation keep the system for at least one day under ap proved operating conditions 3 1 1 Storage This system will operate correctly under following conditions Clean rooms class 10 Ambient temperature 10 C bis 30 C ambient relative humidity max 60 no con densation 3 1 2 Operating Conditions This system will operate correctly under following conditions Clean r...

Страница 22: ...s without vacuum may not exceed 2000 rpm 3 2 1 Unpacking This is a highly sensitive electromechanical appli ance Be careful while unpacking installing starting and operating the unit Check the contents upon unpacking for damages during transport In case of transport damages or damages in transit please contact the manufacturer immediately Verify receipt of all parts based on packing list In case o...

Страница 23: ...INSTALLATION SITE delta10 dl 01 2005 3 3 3 2 3 Dimension BM Modul BM model measurements mm 305 SCREW DIN912 M6 4x HOLE O 6 6 325 290 325 290 305 250 250 302 45 270 ...

Страница 24: ...INSTALLATION SITE delta10 dl 01 2005 3 4 3 2 4 Dimension T Model S t e h b o l z e n M 3 x 1 5 NN NN NN NN NN NN NN NN NN NN NN Backside view ...

Страница 25: ...INSTALLATION SITE delta10 dl 01 2005 3 5 NN NN NN NN NN NN NN St ehbolzen M3 x 15 NN Side view ...

Страница 26: ...o connecting cables Make a cutout of 214 x 108 mm in the carrier plate Put the controller unit into the cutout Remove the left cover plate Turn the inner screws until the controller is firmly fixed Fix the left cover plate Remove the right cover plate Turn the inner screws until the controller is firmly fixed Fix the right cover plate ...

Страница 27: ...ks are required for taking the sub strate to the spinning process Various types of chucks are offered e g with without vacuum disc or cross version with without center pins etc Warning The substrate is placed on the chuck The chuck is specially balanced therefore to handle very cautiously Fit the chuck with its guidance on the motor shaft Therefore put the guidance s long hole on the pin of the mo...

Страница 28: ...ceed maximum values 3 3 5 Connecting to Power Supply All cables and wires are equipped eith unmistacable connections The plugs and sockets are labelled Danger Each installation and operation work at electrical equipment must be done by qualified personnel The valid national instructions e g VDE have to be followed Prior all work check the system s disconnection of the power supply Danger Connect t...

Страница 29: ...N delta10 Rev00 dl 18 01 2005 4 1 4 COMPONENTS AND CONNECTION 4 1 System Components 1 2 3 4 5 6 7 No Description 1 Aluminium plate 2 Spinning bowl 3 Cover 4 Vacuum indicator 5 Vacuum switch 6 Controller with display 7 TT Model ...

Страница 30: ...Media waste opening 4 Vacuum switch On Off 5 Spinning chuck 6 Vacuum gauge 1 2 3 4 5 6 No Description 1 Drain tube for media waste 2 Motor 3 Vacuum hose 4 Motor cable No Description 1 STEP display and button up to 10 steps programmable 2 RPM display and button speed programmable between 100 and 6 000 rpm 3 display and bottons acceleration ramp programmable in 10 steps 0 high 9 low 1 2 4 1 2 3 4 5 ...

Страница 31: ...3 4 3 1 Controller backside No Description 4 TIME display and buttons process time programmable between 1 and 999 sec 5 Function button control led START green STOP red 6 Power button ON OFF No Description 1 Power line 110 V 2 Sensor 3 Motor connection 1 2 3 ...

Страница 32: ...ocess dangerous media residues can still be present on the substrate and in the system Prior to operation of the system this oper ating instruction containing relevant safety instructions should be read care fully and considered accordingly Chuck has to be removed carefully using both hands Chuck has to be stored such that it is not damaged Check cover sensor in regular intervals In case of deviat...

Страница 33: ...Recipe Number To program any recipe no 1 50 the following pro cedure is in case of need Controller set up with ON button After pushing the STOP button you will get the digital P program 1 Numbers selectable to your please Confirm program no input with START button Parameter input for time rotation and ac celeration can be programmed in single step 5 3 Programming of Process Pa rameters When using ...

Страница 34: ...ngerous media During spinning or drying of substrates media evaporate and dangerous vapors and fumes can be set free damaging health or parts of the system Suitable exhaustion is required when pro cessing toxic or dangerous media The maximum rotation speed depends on size and shape of the substrates and the chuck 5 4 1 Switching On the Controller Switch the controller ON 5 4 2 Starting the Spinnin...

Страница 35: ...4 3 Interrupting the Spinning Pro cess Danger In case of a premature interruption of the spinning process media surplus could re main on the substrate or on parts of the machinery Before removing the substrate process chamber and substrate have to be rinsed carefully Press the red STOP button on the controller Ar the display of the panel interface STOP is flashing in the display The chuck brakes w...

Страница 36: ...asures Power supply breaks down Motor runs down Vacuum holds the sub strate option Unload system manu ally Resotre power supply Restart the unit Ensure continuous power supply Cover is opened during process Motor is braked down Error message E1 Close cover Confirm message by pressing STOP Do not open the cover during operation ...

Страница 37: ...6 1 3 Emptying the Media Waste Container Option The media waste container must be emptied when it is full up to 9 10 Take the media waste hose off the special waste container Empty the media waste into a suitable special waste container Press the media hose again in the media waste container 6 1 4 Checking the Exhaust Hoses Whenever the media waste bottle is empried check the exhaust hose for even...

Страница 38: ...1 Disposal of the System At the end of its life span the system has to be di sassembled and disposed according to applicable laws and regulations Upon disposal consider the following Separate materials Forward metals to a recycling process Forward plastic parts to a recycling process Forward electrical Electronic parts to a special waste disposal process Recommendation Get in contact with a waste ...

Страница 39: ...MECHANICAL DRAWINGS AND PARTS LIST delta10 Rev00 dl 18 01 2005 7 1 7 MECHANICAL DRAWINGS AND PARTS LIST 7 1 Drawing Whole Unit ...

Страница 40: ...MECHANICAL DRAWINGS AND PARTS LIST delta10 Rev00 dl 18 01 2005 7 2 7 2 Vacuum coupling ...

Страница 41: ...ver 512 241 40 1 Glas for cover 512 240 50 1 Hinge 1 512 239 60 1 Hinge 2 512 238 70 1 Bolt for hinge 512 237 80 1 Waste pipe 512 236 90 1 Shaft ring 512 056 100 1 Flange 512 235 110 1 Housing 512 058 140 2 Shaft 512 023 260 2 Head cap screws 512 022 270 4 head cap screws 512 013 400 1 Pressure gauge 512 817 410 1 3 2 Way valve 512 026 420 1 Hinge bushing 512 027 ...

Страница 42: ...2 www suss com TECHNICAL DOCUMENTATION Spin Coater Delta10TT AK 200 347 ...

Страница 43: ...2 dl 2005 01 TECHNICAL DOCUMENTATION Electrical Schematics ...

Страница 44: ...UPLY 115 230VAC 10A M16x5 M16 1 0 8AmT F2 0 8AmT F3 1 W001 2 ge gn sw 2x 1 5mm W002 sw bl 7 x 0 5 W003 br gn gr rs ws ge 5 X1 PE X1 X1_5_ br F2_ gn X1_6_ gr F3_ rs X1_7_ ws F1_ bl PE_ Schirm ge 2 1 2 1 2 1 2 1 2 1 2 1 2 1 PE rt rt br br ge ge 01 0105 mk DELTA 10 BM TT 9003 1110 0002 A 000000 9003 1110 0002 Delta 10 R SM Artikel 9 Endpro 9003 1110 0002 Delta 10 Blatt 1 von 4 25 01 05 2x115V 19V 1 6...

Страница 45: ...T_POWER ge 1 2 3 7 8 9 4 5 6 ST_AC ST_A1_2_E1_2 24V_IO br ST_A1_2_E1_2 E1 sw ST_A1_2_E1_2 0V_IO bl ST_ANALOG Sollwert ge ST_ANALOG AGND gr F1_ bl X1_5_ br X1_6_ gr F3_ rs PE_ Schirm ge F2_ gn X1_7_ ws ST_POWER 0V_IO rs ST_POWER 24V_IO bl ST_A1_2_E1_2 A2 gn ST_A1_2_E1_2 A1 br Motor_pin1 ws 1 8 1 8 1 8 1 8 1 8 1 8 1 8 3 1 3 1 3 1 3 1 3 1 3 1 3 1 3 1 3 1 3 1 gn gr rs bl br ws 2x 0 75mm W004 rs bl ws ...

Страница 46: ... ST_A1_2_E1_2 A1 br ST_ANALOG Sollwert ge ST_ANALOG AGND gr ST_POWER 24V_IO bl ST_POWER 0V_IO rs Motor_pin1 ws 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 Deckel Cover bn bu bk S1 bl rs gr ge gn br ws Motor 1 2 3 4 5 6 7 8 M1 01 0105 mk DELTA 10 BM TT 9003 1110 0002 A 000000 9003 1110 0002 Delta 10 R SM Artikel 9 Endpro 9003 1110 0002 Delta 10 Blatt 3 von 4 25 01 05 ...

Страница 47: ...ylab Desy HH Customer Prozess Process Vorgabe Drehzahl Ist Drehzahl Anzeige Drehzahl O K Nominal RPM Actual RPM Monitored RPM 200 240 200 x 500 526 500 x 800 808 800 x 1000 1005 1000 x 2000 2008 2000 x 3000 3007 3000 x 4000 3988 4000 x 5000 5008 5000 x 6000 6005 6000 x Date 08 02 05 Signature Ganzenmüller Dep QS ...

Страница 48: ...rks minimum vacuum 0 80 bar permissible deviation from topside leveling 0 030mm permissible deviation from concentric running 0 030mm Chuck partnumber tool AK protocol number 1 3 525030 200347 Order number testing tool QS 69222 Date 08 02 05 Name Ga accepted rework X SMTL GmbH Chuck inspection protocol 1 of 1 08 02 2005 ...

Страница 49: ...emarks minimum vacuum 0 80 bar permissible deviation from topside leveling 0 030mm permissible deviation from concentric running 0 030mm Chuck partnumber tool AK protocol number 1 3 516903 200347 Order number testing tool QS Date 08 02 05 Name Ga accepted rework X SMTL GmbH Chuck inspection protocol 1 of 1 08 02 2005 ...

Страница 50: ...me fixed Typenschilder angebracht x Name plates fixed CE Beschilderungen Warnschilder x EC labels warning labels Anlage frei von Kratzern x System free of damage Benennungen kplt elektr mechan pneum x Machine labels complete Sämtliche Stecker verschraubt x All connections checked Funktion Deckelsensor Rotationsstop x Chamber lid sensor Rotationstop Zentrierstifte Chuck Format Passung 3 4 x Center ...

Страница 51: ...rface planar Drehzahlprotokoll 200 6000 Rpm x Spin speed protocol 200 6000 Rpm Beschleunigungs Test Rampe 0 9 x Acceleration test 0 9 Rezeptablauf getestet 50 PR je 10 Schritte x Recipe example 50 PR 10 Steps each Taste Start Stop Test x Start Stop Button tested Vakuumstatus bei Stromausfall o k x Vacuum status in case of power failure Fehlermeldungen korrekt E1 E 2 x Error descriptions correct VD...

Страница 52: ...hzahl 200 6000 x Rpm tolerance 60 at Set rotation 200 6000 Lackablaufflasche vorhanden TT Modul x Resist waste bottle present only at TT Module 3m Absaugschlauch vorhanden TT Modul x 3m exhaus tube present TT Module Funktion der Vakuumpumpe n n Vacuum pump tested CE Konformität wurde erreicht x EC Conformity passed Datum Date 08 02 05 Unterschrift Signature Ganzenmüller QSD10Checklist doc ...

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