SUSS MicroTec Delta10TT, Руководство оператора и техническая документация

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MAINTENANCE AND CLEANING
delta10 - Rev00 - dl/28-10-2004
6
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6 MAINTENANCE AND CLEANING
Warning!
Prior to all maintenance and cleaning
work inside the unit, the unit and addi-
tional modules have to be disconnected
from all external and media supplies.
Warning!
All maintenance and service tasks have to
be carried out by specially qualified per-
sons only, knowing the perils and being
able to prevent them by applying suitable
safety measures.
6.1 Maintenance
According to features the media waste container
must be emptied (option).
6.1.1 Cover Closed Sensor
Check daily:
• Open Controller
• Set speed step 0 to 500 rpm, time 5 sec.
• Be shure that theire‘s no substrate on the chuck.
• Press Start button -> „E1“
should appear at the display.
• Sensor o.k.
• If the chuck starts rotating, press Stop button.
• Replace Cover Sensor.
• Don‘t use the machine if the sensor isnt working.
6.1.2 Emptying the Media Waste
Bottle
The media waste bottle must be emptied when it is
full up to 9/10.
• Remove the media waste bottle
• Empty the media waste into a suitable special
waste container.
• Refit the media waste bottle to its connection.
6.1.3 Emptying the Media Waste
Container (Option)
• The media waste container must be emptied
when it is full up to 9/10.
• Take the media waste hose off the special waste
container.
• Empty the media waste into a suitable special
waste container.
• Press the media hose again in the media waste
container.
6.1.4 Checking the Exhaust Hoses
Whenever the media waste bottle is empried check
the exhaust hose for eventual residues.
• Take the exhaust hoses off the system (bottom-
side).
• Check the exhaust hoses for cleanness.
• If the exhaust hoses are dirty, take it off and cle-
an them in acetone.
• Refix the exhaust hoses at the bottomside of the
system.
6.2 Cleaning
The system doesn‘t need any special maintenance,
except occasional cleaning.
Do not use scratching or scouring cleaning agents
or tools.
Cleaning intervals depend on usage intensity and
the type of applied media.
Caution!
Do not use cleaning agents that can
cause damage to the system.
• Clean the chuck, the process chamber and the
process chamber (interior) with DI-water or a
solvent which is suitable for the process chemi-
cal.
• Clean the stainless steel surface, the armatures
and the cabinet only with alcohol or equal sol-
vents.
• If required rinse the hoses with suitable cleaning
agents. The type of cleaning agent depends on
the process media used before.