15 Optional Devices
15.3 Setting the AUX APC Parameters
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GC-2014
15.3.2
Parameter list
PRESS
Range: 0.0
−
400.0 kPa, Default: 100 kPa
Set the pressure when the control mode is set to “PRESS”.
GAS TYPE
Selection: He/N
2
/H
2
/Ar, Default: He
Set the type of gas supplied to the APC. If the gas type is set incorrectly, the flow rate can
not be set as specified in “FLOW” mode. This is because a restrictor is used to calculate the
flow rate.
15.3.3
PF menu
PF menu
Description
Reference
section
Offset
Performs offset calibration of APC sensor to improve the reproducibility of
results.
3.6
Next
Toggles among AOC parameters
→
AUX temperature
→
AUX APC
→
AUX AMC
→
CRG screens
――
On/Off
Set APC to be used to “On”. Default value is “On”.
――
Содержание GC-2014
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