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13 Appendix
H-840 Hexapod Microrobot
MS201E
Version: 2.5.1
67
13.1
Explanations of the Performance Test Sheet
The hexapod is tested for the positioning accuracy of the translation axes before delivery. The
performance test sheet is included in the scope of delivery.
The following figure shows the test setup used.
Figure 12: Test setup for measuring the X or Y axis.
1
Laser interferometer
2
Mirror
3
Bench
The following test cycles are performed:
Motion over the entire travel range with at least 20 measuring points, in at least five
cycles.
Motion over partial sections, e.g., ±1 mm in increments of for example, 100 µm
13
Appendix