PI H-840 Series, Руководство пользователя

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10 Technical Data
52 Version: 2.5.1 MS201E H-840 Hexapod Microrobot
Motion H-840.G2IHP Tolerance
Rotation range in θY ± 15 °
Rotation range in θZ ± 30 °
Maximum velocity in X 2.5 mm/s
Maximum velocity in Y 2.5 mm/s
Maximum velocity in Z 2.5 mm/s
Maximum angular velocity in θX 30 mrad/s
Maximum angular velocity in θY 30 mrad/s
Maximum angular velocity in θZ 30 mrad/s
Typical velocity in X 2 mm/s
Typical velocity in Y 2 mm/s
Typical velocity in Z 2 mm/s
Typical angular velocity in θX 25 mrad/s
Typical angular velocity in θY 25 mrad/s
Typical angular velocity in θZ 25 mrad/s
Positioning H-840.G2IHP Tolerance
Integrated sensor Incremental rotary encoder
Unidirectional repeatability in X ± 0.3 µm typ.
Unidirectional repeatability in Y ± 0.3 µm typ.
Unidirectional repeatability in Z ± 0.1 µm typ.
Unidirectional repeatability in θX ± 2.5 µrad typ.
Unidirectional repeatability in θY ± 2.5 µrad typ.
Unidirectional repeatability in θZ ± 3 µrad typ.
Minimum incremental motion in X 0.04 µm typ.
Minimum incremental motion in Y 0.04 µm typ.
Minimum incremental motion in Z 0.02 µm typ.
Minimum incremental motion in θX 0.2 µrad typ.
Minimum incremental motion in θY 0.2 µrad typ.
Minimum incremental motion in θZ 0.4 µrad typ.
Backlash in X 2 µm typ.
Backlash in Y 2 µm typ.
Backlash in Z 0.3 µm typ.
Backlash in θX 5 µrad typ.
Backlash in θY 5 µrad typ.
Backlash in θZ 10 µrad typ.