10 Technical Data
50
Version: 2.5.1
MS201E
H-840 Hexapod Microrobot
Motion
H-840.D2I
H-840.G2I
Tolerance
Typical velocity in Z
40 mm/s
2 mm/s
Typical angular velocity in θX
480 mrad/s
25 mrad/s
Typical angular velocity in θY
480 mrad/s
25 mrad/s
Typical
angular velocity in θZ
480 mrad/s
25 mrad/s
Amplitude-frequency product in X
23.6 mm·Hz
Amplitude-frequency product in Y
23.6 mm·Hz
Amplitude-frequency product in Z
8 mm·Hz
Amplitude-
frequency product in θX
5.1 °·Hz
Amplitude-frequency produ
ct in θY
5.1 °·Hz
Amplitude-
frequency product in θZ
14 °·Hz
Amplitude-frequency² product in X 65.9 mm·Hz²
Amplitude-frequency² product in Y 65.9 mm·Hz²
Amplitude-frequency² product in Z 22.5 mm·Hz²
Amplitude-
frequency² product in θX
14.7 °·Hz²
Amplitude-
frequency² product in θY
14.7 °·Hz²
Amplitude-
frequency² product in θZ
41 °·Hz²
Amplitude error
10 %
max.
Phase error
60 °
max.
Maximum frequency
30 Hz
Positioning
H-840.D2I
H-840.G2I
Tolerance
Integrated sensor
Incremental rotary encoder Incremental rotary encoder
Unidirectional repeatability in X
± 0.3 µm
± 0.3 µm
typ.
Unidirectional repeatability in Y
± 0.3 µm
± 0.3 µm
typ.
Unidirectional repeatability in Z
± 0.1 µm
± 0.1 µm
typ.
Unidirectional repeatability in θX
± 1.5 µrad
± 2.5 µrad
typ.
Unidirectional repeatability in θY
± 1.5 µrad
± 2.5 µrad
typ.
Unidirectional repeatability in θZ
± 3 µrad
± 3 µrad
typ.
Minimum incremental motion in X 0.5 µm
0.25 µm
typ.
Minimum incremental motion in Y 0.5 µm
0.25 µm
typ.
Minimum incremental motion in Z 0.25 µm
0.15 µm
typ.
Minimum incremental motion in θX
3 µrad
2 µrad
typ.
Minimum incremental motion in θY
3 µrad
2 µrad
typ.
Minimum incremental motion in θZ
5 µrad
4 µrad
typ.
Backlash in X
1.5 µm
2 µm
typ.