10 Technical Data
48
Version: 2.5.1
MS201E
H-840 Hexapod Microrobot
Motion
H-840.D2A
H-840.G2A
Tolerance
Amplitude-
frequency product in θZ
14 °·Hz
Amplitude-frequency² product in X 65.9 mm·Hz²
Amplitude-frequency² product in Y 65.9 mm·Hz²
Amplitude-frequency² product in Z 22.5 mm·Hz²
Amplitude-
frequency² product in θ
X 14.7 °·Hz²
Amplitude-
frequency² product in θY
14.7 °·Hz²
Amplitude-
frequency² product in θZ
41 °·Hz²
Amplitude error
10 %
max.
Phase error
60 °
max.
Maximum frequency
30 Hz
Positioning
H-840.D2A
H-840.G2A
Tolerance
Integrated sensor
Absolute rotary encoder,
multi-turn
Absolute rotary encoder,
multi-turn
Unidirectional repeatability in X
± 0.3 µm
± 0.3 µm
typ.
Unidirectional repeatability in Y
± 0.3 µm
± 0.3 µm
typ.
Unidirectional repeatability in Z
± 0.1 µm
± 0.1 µm
typ.
Unidirecti
onal repeatability in θX
± 1.5 µrad
± 2.5 µrad
typ.
Unidirectional repeatability in θY
± 1.5 µrad
± 2.5 µrad
typ.
Unidirectional repeatability in θZ
± 3 µrad
± 3 µrad
typ.
Minimum incremental motion in X 1.5 µm
0.3 µm
typ.
Minimum incremental motion in Y 1.5 µm
0.3 µm
typ.
Minimum incremental motion in Z 1 µm
0.2 µm
typ.
Minimum incremental motion in θX
10 µrad
2 µrad
typ.
Minimum incremental motion in θY
10 µrad
2 µrad
typ.
Minimum incremental motion in θZ
2 µrad
4 µrad
typ.
Backlash in X
1.5 µm
2 µm
typ.
Backlash in Y
1.5 µm
2 µm
typ.
Backlash in Z
0.2 µm
0.3 µm
typ.
Backlash in θX
4 µrad
5 µrad
typ.
Backlash in θY
4 µrad
5 µrad
typ.
Backlash in θZ
8 µrad
10 µrad
typ.
Drive properties
H-840.D2A
H-840.G2A
Tolerance
Drive type
Brushless DC motor
Brushless DC gear motor
