9
•
Interval Time (min)= sputter increments, in
units of .5min.
•
Delayed Acq. Time (sec) = Delay before
acquisition to allow count rate to stabilize. 3s is
typical.
•
Num(Presputter) = How many scans to take
before 1
st
sputter. 1 is typical.
o
Now, number of cycles is determined by sputter settings. Add
“repeats” to increase signal for some acquisitions.
o
Push
ACQUIRE
to begin depth profile.
o
The charge neutralizer can be used during depth profiling.
5. To Shut Down Sputtering/Neutralizer
a.
Summitt->
Acquisition Setting window (LHS)-> Choose
No Sputter
in “Sputter Mode” category
(FIG 9)
.
b.
Summitt->
Acquisition Setting window (LHS)-> Choose
Off
in
“Neutralize” category
(FIG 9)
.
c.
Summitt->
“Image” Window (RHS) -> “Ion Gun” Tab: Push
Off (FIG
6)
.
d. On Pfeiffer RVG050 box
(FIG 7)
, toggle white switch to
Limit
.
Never turn off power to Pfeiffer RVG050!
e.
Summitt->
“Image” Window -> Push
Off
in Neutralizer Tab
(FIG 8)
.
FIG 9. Depth Profile Setup