PHI VersaProbe Скачать руководство пользователя страница 8

   

8   

 

3.  Charge Neutralization 

a. 

Summitt->

 “Image” window (RHS), “Neutralizer” tab 

(FIG 8)

b.  Push 

Standby 

(will turn on power to electron flood gun). 

c. 

Summitt->

 “Acquisition Settings” window (LHS).  Under 

“Neutralize,” Press 

ON. 

  Neutralization will begin when spectrum is 

acquired. 

d.  If need to do AutoZ, check the Neutralize and Ion Gun Neutralize 

boxes in SXI/AutoZ tab 

(FIG 3)

 
 

 
 
 
 
 
 
 
 
 
 
 
 
 
 
FIG 8: Summit “Image” Window, Neutralizer 

 
 

4.  Sputter Modes 

 

  Manual Sputter 

o

 

Summitt->

 When pressure conditions are ready, pushing 

Sputter

 in “Ion Gun” tab will immediately sputter.   

o

  For manual, timed sputter: 

o

   choose a low KV sputter file, check “timed” box, set time, 

then push 

Sputter

  Depth Profiling 

(See FIG 9)

o

 

Summitt-> 

Ion gun is in Standby in the “Ion Gun” tab and 

desired sputter file is chosen. 

o

 

Summitt->

 Acquisition Setting window -> Check/Enter desired 

acquisitions. 

o

 

Summitt->

 Acquisition Setting window (LHS)-> Push 

Alternate

 

in “Sputter Mode” category. Will open Sputter Setting options 
below. 

o

  Typical Settings: 

  Sputter Time (min)= total time to sputter. 

   

Содержание VersaProbe

Страница 1: ...tart contact a lab supervisor Make sure Summitt is not already open and minimized before opening Two open versions will cause problems Never close Watcher It remains open even if Summitt is restarted...

Страница 2: ...a new timer starts for the turbo Wait for timer to finish and Task Pump Intro complete message in Watcher The gauge for the Intro chamber will read until 10 2 Pa and then read 0 While waiting for intr...

Страница 3: ...3 When stage has stopped moving follow instructions in Intro dialog box see next step below FIG 1 Vacuum Watcher Intro Procedure FIG 2 Summit Image Window Stage Tab Intro Procedure 3 5 8...

Страница 4: ...older The Intro dialog box will indicate that the stage is moving 6 If the stage has successfully grabbed the sample and is no longer moving carefully pull the transfer rod out of the chamber to the s...

Страница 5: ...maximum The stage height will rise for routine increments and then decrease and rise again in smaller steps until done Push Ok and close AutoZ window when finished a If final height is not on desired...

Страница 6: ...est statistics and most counts but may need smaller spot for localized area or acquisition within sputtered region See Figure 5 6 Summitt Acquisition Settings Window LHS Push Acquire to start 7 To use...

Страница 7: ...ing you to push Diff vlv Open OK e On Pfeiffer RVG050 FIG 7 box near computer monitor toggle white switch to Set Point In Ion Gun tab check Ext Pressure mPa readout and watch until stabilizes 10mPa Th...

Страница 8: ...utter Modes Manual Sputter o Summitt When pressure conditions are ready pushing Sputter in Ion Gun tab will immediately sputter o For manual timed sputter o choose a low KV sputter file check timed bo...

Страница 9: ...ACQUIRE to begin depth profile o The charge neutralizer can be used during depth profiling 5 To Shut Down Sputtering Neutralizer a Summitt Acquisition Setting window LHS Choose No Sputter in Sputter M...

Страница 10: ...indow will open prompting to insert sample Carefully push transfer rod into chamber and sliding it until the stop position Fork should slide onto sample holder Push OK on Task Message Window 3 Summitt...

Страница 11: ...11 FIG 11 Vacuum Watcher Extract procedure 2 4 5...

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