PHI VersaProbe Скачать руководство пользователя страница 7

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b. For sputtering, choose desired sputter file. Chart taped to PHI

console explains choices.

c. Push

Standby

(will turn on power to sputter gun).

d. A dialogue box will open reminding you to push Diff vlv Open.

OK.

e. On Pfeiffer RVG050

(FIG 7)

box near computer monitor, toggle

white switch to

Set Point

. In “Ion Gun” tab, check

Ext.Pressure(mPa) readout and watch until stabilizes ~10mPa.
The main chamber pressure will also get worse (1x10

-6

FIG 6: Summit “Image” Window, Ion Gun

FIG 7: Pfeiffer RVG050C Vacuum Control Box

Choose sputter settings
Choose Neutralize file

Содержание VersaProbe

Страница 1: ...tart contact a lab supervisor Make sure Summitt is not already open and minimized before opening Two open versions will cause problems Never close Watcher It remains open even if Summitt is restarted...

Страница 2: ...a new timer starts for the turbo Wait for timer to finish and Task Pump Intro complete message in Watcher The gauge for the Intro chamber will read until 10 2 Pa and then read 0 While waiting for intr...

Страница 3: ...3 When stage has stopped moving follow instructions in Intro dialog box see next step below FIG 1 Vacuum Watcher Intro Procedure FIG 2 Summit Image Window Stage Tab Intro Procedure 3 5 8...

Страница 4: ...older The Intro dialog box will indicate that the stage is moving 6 If the stage has successfully grabbed the sample and is no longer moving carefully pull the transfer rod out of the chamber to the s...

Страница 5: ...maximum The stage height will rise for routine increments and then decrease and rise again in smaller steps until done Push Ok and close AutoZ window when finished a If final height is not on desired...

Страница 6: ...est statistics and most counts but may need smaller spot for localized area or acquisition within sputtered region See Figure 5 6 Summitt Acquisition Settings Window LHS Push Acquire to start 7 To use...

Страница 7: ...ing you to push Diff vlv Open OK e On Pfeiffer RVG050 FIG 7 box near computer monitor toggle white switch to Set Point In Ion Gun tab check Ext Pressure mPa readout and watch until stabilizes 10mPa Th...

Страница 8: ...utter Modes Manual Sputter o Summitt When pressure conditions are ready pushing Sputter in Ion Gun tab will immediately sputter o For manual timed sputter o choose a low KV sputter file check timed bo...

Страница 9: ...ACQUIRE to begin depth profile o The charge neutralizer can be used during depth profiling 5 To Shut Down Sputtering Neutralizer a Summitt Acquisition Setting window LHS Choose No Sputter in Sputter M...

Страница 10: ...indow will open prompting to insert sample Carefully push transfer rod into chamber and sliding it until the stop position Fork should slide onto sample holder Push OK on Task Message Window 3 Summitt...

Страница 11: ...11 FIG 11 Vacuum Watcher Extract procedure 2 4 5...