PHI VersaProbe, Операции, Страница: 1 / 11

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PHI VersaProbe Scanning XPS System
I. Overview
The PHI VersaProbe operates with two essential software programs:
PHI
Summitt and Vacuum Watcher . A third program, MultiPak , handles data
reduction.
PHI Summitt controls the movement of the sample stage, the analysis setup and
acquisition, and the control of the ion gun and neutralizer gun.
Vacuum Watcher is a separate program that interacts with PHI Summitt and is
used to load and transfer samples and differentially pump the ion gun for
sputtering.
Summitt and Watcher should always be open (running) on the instrument. Do
not close these programs without specific instructions from a lab supervisor.
•
If Summitt crashes, it can be closed and reopened. If problem
persists after restart, contact a lab supervisor.
•
Make sure Summitt is not already open and minimized before
opening. Two open versions will cause problems.
•
Never close Watcher. It remains open even if Summitt is restarted.
•
If instructed to restart the computer, open Watcher first, then
Summitt .
II. Features
The VersaProbe XPS is capable of x-ray beam spot sizes from 10um-200um and
a High Power setting with a beam spot of roughly 1400x300um.
Secondary electron images (SXI) can be acquired to locate specific features to
be analyzed.
Computer controlled X, Y, Z, Tilt and Rotate stage control.
Auto Z alignment for optimization of x-ray impact and electron extraction.
Angle-resolved measurements can be done to analyze ultra thin films (with 1”
holder only).
Sputtering can be done to analyze thicker films or remove surface contamination.
System has both Ar+ and C60 sputter guns.
Dual beam (electrons and ions) for charge neutralization of insulating samples.