PHI VersaProbe Скачать руководство пользователя страница 4

   

4   

4. 

Watcher -> 

Push 

Transfer Sample 

 

  A “

Task Message

” window will open. Press 

Yes

 to confirm sample 

transfer.

 

 

  Gate valve (V1) will open.  Wait until white line has moved to “open” 

position on gate valve to confirm before moving sample. 

  Another  “

Task  Message

”  window  will  open  prompting  to  insert 

sample.    Carefully  push 

transfer  rod

  into  chamber  by  grasping 

black handle and sliding it until the stop position.  Push 

OK

 on Task 

Message  Window.    Sample  should  be  on  fork,  positioned  just 
above the stage in the main chamber. 
 

5. 

Summitt ->

 Push 

Up  [Z]

 in the 

“Intro” dialog box

.  The stage will move Z 

upward to grab the sample holder.  The 

“Intro” dialog box

 will indicate that 

the stage is moving.   

6.  If the stage has successfully grabbed the sample and is no longer moving, 

carefully pull the 

transfer rod

 out of the chamber to the stop position. 

7.  The gate valve (V1) will automatically close. 

 

If stage is not aligned to the sample correctly, and a problem arises 
during  Up  [Z],  push 

Abort

  in  the 

“Intro”  dialog  box

  and  manually 

drop  Z.    To  drop  Z: 

Summitt  “Image”  Window-> 

type  a  small 

number  in  the  Z(mm)  box  on  the  “Stage”  tab  and  push 

Move

.  

Contact a lab manager for help. 
 

8. 

Summitt  ->

  In  the  “Intro”  dialog  box,  push 

Set

  (Sample  Inf.)  to  update 

sample thickness and holder size, thereby enabling collision protection for 
the extractor lens and good Z-height alignment. Push 

OK

 to close box. 

 

 

FIG 3: Summit “Image” Window, Auto Z                      FIG 4: Stage Controller 

 
 

Auto Z 

Содержание VersaProbe

Страница 1: ...tart contact a lab supervisor Make sure Summitt is not already open and minimized before opening Two open versions will cause problems Never close Watcher It remains open even if Summitt is restarted...

Страница 2: ...a new timer starts for the turbo Wait for timer to finish and Task Pump Intro complete message in Watcher The gauge for the Intro chamber will read until 10 2 Pa and then read 0 While waiting for intr...

Страница 3: ...3 When stage has stopped moving follow instructions in Intro dialog box see next step below FIG 1 Vacuum Watcher Intro Procedure FIG 2 Summit Image Window Stage Tab Intro Procedure 3 5 8...

Страница 4: ...older The Intro dialog box will indicate that the stage is moving 6 If the stage has successfully grabbed the sample and is no longer moving carefully pull the transfer rod out of the chamber to the s...

Страница 5: ...maximum The stage height will rise for routine increments and then decrease and rise again in smaller steps until done Push Ok and close AutoZ window when finished a If final height is not on desired...

Страница 6: ...est statistics and most counts but may need smaller spot for localized area or acquisition within sputtered region See Figure 5 6 Summitt Acquisition Settings Window LHS Push Acquire to start 7 To use...

Страница 7: ...ing you to push Diff vlv Open OK e On Pfeiffer RVG050 FIG 7 box near computer monitor toggle white switch to Set Point In Ion Gun tab check Ext Pressure mPa readout and watch until stabilizes 10mPa Th...

Страница 8: ...utter Modes Manual Sputter o Summitt When pressure conditions are ready pushing Sputter in Ion Gun tab will immediately sputter o For manual timed sputter o choose a low KV sputter file check timed bo...

Страница 9: ...ACQUIRE to begin depth profile o The charge neutralizer can be used during depth profiling 5 To Shut Down Sputtering Neutralizer a Summitt Acquisition Setting window LHS Choose No Sputter in Sputter M...

Страница 10: ...indow will open prompting to insert sample Carefully push transfer rod into chamber and sliding it until the stop position Fork should slide onto sample holder Push OK on Task Message Window 3 Summitt...

Страница 11: ...11 FIG 11 Vacuum Watcher Extract procedure 2 4 5...

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