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2   

III. 

Mounting Samples 

 
1” and 2” mounts are available.  CuBe clips or double-sided tape can be used to 
adhere samples to the mounts.  Use the smallest piece of tape possible to avoid 
excessive outgassing.  Silver or Carbon paint (allowed to dry) is also an option 
for mounting.  Molybdenum masks can be secured to avoid using tape or paint. 
 
For angle-resolved experiments, must use 1” holder. 
 

IV. 

Sample Introduction (See Figures 1 and 2.) 

 

1. 

Watcher -> 

Press 

Backfill Intro

.  Will close valve over turbo pump and 

open N2 gas to fill chamber. 

 

  Lift cap and place sample onto fork with tongs.  For 1” holders, 

hold tongs with top groove and slide bottom groove onto fork.   

  Check  o-ring  on  underside  of  cap,  remove  any  dust  or  fibers 

with a clean wipe, and replace cap. 

 

2. 

Watcher -> 

Press 

Pump  Intro

. N2 valve closes, Roughing pump acts on 

intro chamber, when vacuum is ready, turbo will be opened.  A timer starts 
counting in 

Watcher

.  20 minutes are allowed for roughing, and then a new 

timer starts for the turbo.  Wait for timer to finish and 

“Task  Pump  Intro 

complete”  message  in 

Watcher

.

  The  gauge  for  the  Intro  chamber  will 

read until ~10

-2

 Pa and then read “0”. 

 
While waiting for intro chamber to reach desired vacuum level: 

  Enable the PHI in Badger. (Will allow use of optical microscope 

and CCD camera on sample.) 

  Set  up  file  for  saved  data.   

Summitt  ->

  Push 

Folder 

button  at 

bottom left of “Acquisition Settings” window. Save in C:\Data. 

  Check 

Summitt 

to  make  sure  previous  user  did  not  leave 

undesirable settings.  (I.e. “No sputter” is selected, Neutralize is 
“off.”    In 

Summitt  -> 

“Image”  window,  under  “SXI/AutoZ”  tab, 

make  sure  “Neutralizer”  and  “Ion  Gun  Neut.”  are  deselected  if 
not desired.) 

 

Summitt -> 

“Image” window: Select desired Xray beam settings 

to be used later for AutoZ and for acquisition in the “SXI/AutoZ” 
and “X-Ray” tabs. 

 

3. 

Summitt ->

 At bottom of “Image” window, choose “Stage” tab. Press 

Intro

 

to move the stage to the home position for sample introduction.  

  An “

Intro” dialog box

 will open and indicate that the stage is moving. 

  If the X, Y, Z coordinates of the stage are visible in the 

Summitt

 

“Image” window, the numbers will be red when the stage is moving. 

Содержание VersaProbe

Страница 1: ...tart contact a lab supervisor Make sure Summitt is not already open and minimized before opening Two open versions will cause problems Never close Watcher It remains open even if Summitt is restarted...

Страница 2: ...a new timer starts for the turbo Wait for timer to finish and Task Pump Intro complete message in Watcher The gauge for the Intro chamber will read until 10 2 Pa and then read 0 While waiting for intr...

Страница 3: ...3 When stage has stopped moving follow instructions in Intro dialog box see next step below FIG 1 Vacuum Watcher Intro Procedure FIG 2 Summit Image Window Stage Tab Intro Procedure 3 5 8...

Страница 4: ...older The Intro dialog box will indicate that the stage is moving 6 If the stage has successfully grabbed the sample and is no longer moving carefully pull the transfer rod out of the chamber to the s...

Страница 5: ...maximum The stage height will rise for routine increments and then decrease and rise again in smaller steps until done Push Ok and close AutoZ window when finished a If final height is not on desired...

Страница 6: ...est statistics and most counts but may need smaller spot for localized area or acquisition within sputtered region See Figure 5 6 Summitt Acquisition Settings Window LHS Push Acquire to start 7 To use...

Страница 7: ...ing you to push Diff vlv Open OK e On Pfeiffer RVG050 FIG 7 box near computer monitor toggle white switch to Set Point In Ion Gun tab check Ext Pressure mPa readout and watch until stabilizes 10mPa Th...

Страница 8: ...utter Modes Manual Sputter o Summitt When pressure conditions are ready pushing Sputter in Ion Gun tab will immediately sputter o For manual timed sputter o choose a low KV sputter file check timed bo...

Страница 9: ...ACQUIRE to begin depth profile o The charge neutralizer can be used during depth profiling 5 To Shut Down Sputtering Neutralizer a Summitt Acquisition Setting window LHS Choose No Sputter in Sputter M...

Страница 10: ...indow will open prompting to insert sample Carefully push transfer rod into chamber and sliding it until the stop position Fork should slide onto sample holder Push OK on Task Message Window 3 Summitt...

Страница 11: ...11 FIG 11 Vacuum Watcher Extract procedure 2 4 5...

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