6
•
Pass Energy: 23.5eV
•
Range: varies by element, can push
Test Acquire
to ensure
peak is within region.
•
Energy Step: 0.1eV
•
Time/Step: 50ms
•
Repeats: Add repeats to regions that need better statistics.
c. For faster option, can choose
Unscan
at bottom of
Summitt->
Acquisition Setting window.
3. Place a check in box at left side of each line to be acquired.
4.
Do not collect SUR and high resolution regions at the same
time/under same file name.
5.
Summitt->
“Image” Window, “XRAY” tab, choose the spot size/power to be
used for scan. HP or 200um spots give best statistics and most counts,
but may need smaller spot for localized area or acquisition within
sputtered region.
See Figure 5.
6.
Summitt-> “Acquisition Settings”
Window (LHS).
Push
Acquire
to start.
7. To use Ion Gun for sputtering or charge compensation, see Section 7.
8. To analyze data, see the
MultiPak
manual.
FIG 5: Summit “Image” Window, X-RAY
VII.
Starting the Ion Gun—Neutralization or Sputtering
(Figures 6-9)
For the purpose of sputtering or neutralizing, must follow steps 1-2e to start the
Ion Gun.
1.
Watcher ->
Push
Diff vlv Open
, opens V4 to start pumping Ion Gun (will
stop pumping on intro chamber).
2.
Summitt->
“Image” window (RHS), “Ion Gun” tab
(FIG 6)
:
a. For charge neutralization, choose “Neutralize” file under
“Neutralize” heading.
Choose X-ray spot size